JPH0555480B2 - - Google Patents

Info

Publication number
JPH0555480B2
JPH0555480B2 JP7036386A JP7036386A JPH0555480B2 JP H0555480 B2 JPH0555480 B2 JP H0555480B2 JP 7036386 A JP7036386 A JP 7036386A JP 7036386 A JP7036386 A JP 7036386A JP H0555480 B2 JPH0555480 B2 JP H0555480B2
Authority
JP
Japan
Prior art keywords
gallium arsenide
single crystal
ppm
growing
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP7036386A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62226895A (ja
Inventor
Hisanori Fujita
Eiichiro Nishihara
Katsushi Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Kasei Polytec Co
Mitsubishi Chemical Corp
Mitsubishi Kasei Corp
Mitsubishi Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Kasei Polytec Co, Mitsubishi Chemical Corp, Mitsubishi Kasei Corp, Mitsubishi Chemical Industries Ltd filed Critical Mitsubishi Kasei Polytec Co
Priority to JP7036386A priority Critical patent/JPS62226895A/ja
Publication of JPS62226895A publication Critical patent/JPS62226895A/ja
Publication of JPH0555480B2 publication Critical patent/JPH0555480B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP7036386A 1986-03-28 1986-03-28 ひ化ガリウム単結晶の成長方法 Granted JPS62226895A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7036386A JPS62226895A (ja) 1986-03-28 1986-03-28 ひ化ガリウム単結晶の成長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7036386A JPS62226895A (ja) 1986-03-28 1986-03-28 ひ化ガリウム単結晶の成長方法

Publications (2)

Publication Number Publication Date
JPS62226895A JPS62226895A (ja) 1987-10-05
JPH0555480B2 true JPH0555480B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-17

Family

ID=13429275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7036386A Granted JPS62226895A (ja) 1986-03-28 1986-03-28 ひ化ガリウム単結晶の成長方法

Country Status (1)

Country Link
JP (1) JPS62226895A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS62226895A (ja) 1987-10-05

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees