JPS622250U - - Google Patents
Info
- Publication number
- JPS622250U JPS622250U JP9232085U JP9232085U JPS622250U JP S622250 U JPS622250 U JP S622250U JP 9232085 U JP9232085 U JP 9232085U JP 9232085 U JP9232085 U JP 9232085U JP S622250 U JPS622250 U JP S622250U
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- chassis
- stage
- semiconductor wafer
- wafer inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 6
- 238000007689 inspection Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 2
- 241001422033 Thestylus Species 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9232085U JPS622250U (de) | 1985-06-20 | 1985-06-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9232085U JPS622250U (de) | 1985-06-20 | 1985-06-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS622250U true JPS622250U (de) | 1987-01-08 |
Family
ID=30649013
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9232085U Pending JPS622250U (de) | 1985-06-20 | 1985-06-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS622250U (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01161174A (ja) * | 1987-12-17 | 1989-06-23 | Tokyo Electron Ltd | プローブ装置 |
JPH07110364A (ja) * | 1994-03-28 | 1995-04-25 | Tokyo Electron Ltd | プローブ装置及びプロービング方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS541630A (en) * | 1977-06-06 | 1979-01-08 | Canon Inc | Image bearing material |
JPS58111335A (ja) * | 1981-12-25 | 1983-07-02 | Hitachi Ltd | 光素子用ウエハプロ−バ |
JPS5917260A (ja) * | 1982-07-20 | 1984-01-28 | Mitsubishi Electric Corp | 半導体ウエハの試験方法 |
JPS6018929A (ja) * | 1983-07-12 | 1985-01-31 | Nec Corp | 探針位置検査装置 |
JPS60213040A (ja) * | 1984-04-09 | 1985-10-25 | Hitachi Ltd | ウエ−ハプロ−バ装置 |
JPS6119143A (ja) * | 1984-07-06 | 1986-01-28 | Nec Corp | 半導体装置の検査装置 |
-
1985
- 1985-06-20 JP JP9232085U patent/JPS622250U/ja active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS541630A (en) * | 1977-06-06 | 1979-01-08 | Canon Inc | Image bearing material |
JPS58111335A (ja) * | 1981-12-25 | 1983-07-02 | Hitachi Ltd | 光素子用ウエハプロ−バ |
JPS5917260A (ja) * | 1982-07-20 | 1984-01-28 | Mitsubishi Electric Corp | 半導体ウエハの試験方法 |
JPS6018929A (ja) * | 1983-07-12 | 1985-01-31 | Nec Corp | 探針位置検査装置 |
JPS60213040A (ja) * | 1984-04-09 | 1985-10-25 | Hitachi Ltd | ウエ−ハプロ−バ装置 |
JPS6119143A (ja) * | 1984-07-06 | 1986-01-28 | Nec Corp | 半導体装置の検査装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01161174A (ja) * | 1987-12-17 | 1989-06-23 | Tokyo Electron Ltd | プローブ装置 |
JPH07110364A (ja) * | 1994-03-28 | 1995-04-25 | Tokyo Electron Ltd | プローブ装置及びプロービング方法 |
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