JPS6249232U - - Google Patents

Info

Publication number
JPS6249232U
JPS6249232U JP14123585U JP14123585U JPS6249232U JP S6249232 U JPS6249232 U JP S6249232U JP 14123585 U JP14123585 U JP 14123585U JP 14123585 U JP14123585 U JP 14123585U JP S6249232 U JPS6249232 U JP S6249232U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
movable stage
alignment
hole
disposed below
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14123585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14123585U priority Critical patent/JPS6249232U/ja
Publication of JPS6249232U publication Critical patent/JPS6249232U/ja
Pending legal-status Critical Current

Links

JP14123585U 1985-09-13 1985-09-13 Pending JPS6249232U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14123585U JPS6249232U (de) 1985-09-13 1985-09-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14123585U JPS6249232U (de) 1985-09-13 1985-09-13

Publications (1)

Publication Number Publication Date
JPS6249232U true JPS6249232U (de) 1987-03-26

Family

ID=31048833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14123585U Pending JPS6249232U (de) 1985-09-13 1985-09-13

Country Status (1)

Country Link
JP (1) JPS6249232U (de)

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