JPS6249232U - - Google Patents
Info
- Publication number
- JPS6249232U JPS6249232U JP14123585U JP14123585U JPS6249232U JP S6249232 U JPS6249232 U JP S6249232U JP 14123585 U JP14123585 U JP 14123585U JP 14123585 U JP14123585 U JP 14123585U JP S6249232 U JPS6249232 U JP S6249232U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- movable stage
- alignment
- hole
- disposed below
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14123585U JPS6249232U (de) | 1985-09-13 | 1985-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14123585U JPS6249232U (de) | 1985-09-13 | 1985-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6249232U true JPS6249232U (de) | 1987-03-26 |
Family
ID=31048833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14123585U Pending JPS6249232U (de) | 1985-09-13 | 1985-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6249232U (de) |
-
1985
- 1985-09-13 JP JP14123585U patent/JPS6249232U/ja active Pending