JPS6236531U - - Google Patents
Info
- Publication number
- JPS6236531U JPS6236531U JP12705085U JP12705085U JPS6236531U JP S6236531 U JPS6236531 U JP S6236531U JP 12705085 U JP12705085 U JP 12705085U JP 12705085 U JP12705085 U JP 12705085U JP S6236531 U JPS6236531 U JP S6236531U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- mask
- aligner
- mask aligner
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12705085U JPS6236531U (de) | 1985-08-20 | 1985-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12705085U JPS6236531U (de) | 1985-08-20 | 1985-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6236531U true JPS6236531U (de) | 1987-03-04 |
Family
ID=31021431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12705085U Pending JPS6236531U (de) | 1985-08-20 | 1985-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6236531U (de) |
-
1985
- 1985-08-20 JP JP12705085U patent/JPS6236531U/ja active Pending