JPS6351435U - - Google Patents

Info

Publication number
JPS6351435U
JPS6351435U JP14604286U JP14604286U JPS6351435U JP S6351435 U JPS6351435 U JP S6351435U JP 14604286 U JP14604286 U JP 14604286U JP 14604286 U JP14604286 U JP 14604286U JP S6351435 U JPS6351435 U JP S6351435U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
chuck
spraying
development processing
developer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14604286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14604286U priority Critical patent/JPS6351435U/ja
Publication of JPS6351435U publication Critical patent/JPS6351435U/ja
Pending legal-status Critical Current

Links

JP14604286U 1986-09-22 1986-09-22 Pending JPS6351435U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14604286U JPS6351435U (de) 1986-09-22 1986-09-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14604286U JPS6351435U (de) 1986-09-22 1986-09-22

Publications (1)

Publication Number Publication Date
JPS6351435U true JPS6351435U (de) 1988-04-07

Family

ID=31058140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14604286U Pending JPS6351435U (de) 1986-09-22 1986-09-22

Country Status (1)

Country Link
JP (1) JPS6351435U (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014103274A (ja) * 2012-11-20 2014-06-05 Shindengen Electric Mfg Co Ltd レジスト現像装置、レジスト現像方法及び半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014103274A (ja) * 2012-11-20 2014-06-05 Shindengen Electric Mfg Co Ltd レジスト現像装置、レジスト現像方法及び半導体装置の製造方法

Similar Documents

Publication Publication Date Title
JPS6351435U (de)
JPS6329931U (de)
JPH02132934U (de)
JPH01100435U (de)
JPS62131433U (de)
JPS63162528U (de)
JPH0256431U (de)
JPS62204326U (de)
JPH0167736U (de)
JPS6379646U (de)
JPS6364032U (de)
JPS62192636U (de)
JPH0395634U (de)
JPH03109328U (de)
JPS6236531U (de)
JPS6230336U (de)
JPS63159823U (de)
JPS6331532U (de)
JPS61173140U (de)
JPH0215864U (de)
JPH0485731U (de)
JPH02113330U (de)
JPS63100825U (de)
JPS63164215U (de)
JPS6287434U (de)