JPH02132934U - - Google Patents
Info
- Publication number
- JPH02132934U JPH02132934U JP4341089U JP4341089U JPH02132934U JP H02132934 U JPH02132934 U JP H02132934U JP 4341089 U JP4341089 U JP 4341089U JP 4341089 U JP4341089 U JP 4341089U JP H02132934 U JPH02132934 U JP H02132934U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- photoresist
- semi
- developer
- developing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000000059 patterning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4341089U JPH02132934U (de) | 1989-04-12 | 1989-04-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4341089U JPH02132934U (de) | 1989-04-12 | 1989-04-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02132934U true JPH02132934U (de) | 1990-11-05 |
Family
ID=31555801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4341089U Pending JPH02132934U (de) | 1989-04-12 | 1989-04-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02132934U (de) |
-
1989
- 1989-04-12 JP JP4341089U patent/JPH02132934U/ja active Pending