JPS639130U - - Google Patents
Info
- Publication number
- JPS639130U JPS639130U JP10248186U JP10248186U JPS639130U JP S639130 U JPS639130 U JP S639130U JP 10248186 U JP10248186 U JP 10248186U JP 10248186 U JP10248186 U JP 10248186U JP S639130 U JPS639130 U JP S639130U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- organic solvent
- drain cup
- wafer chuck
- discharging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 229920002120 photoresistant polymer Polymers 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 2
- 239000003960 organic solvent Substances 0.000 claims 3
- 238000004528 spin coating Methods 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10248186U JPS639130U (de) | 1986-07-02 | 1986-07-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10248186U JPS639130U (de) | 1986-07-02 | 1986-07-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS639130U true JPS639130U (de) | 1988-01-21 |
Family
ID=30974164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10248186U Pending JPS639130U (de) | 1986-07-02 | 1986-07-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS639130U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0290845U (de) * | 1988-12-30 | 1990-07-18 | ||
| US11730281B2 (en) | 2019-02-01 | 2023-08-22 | Ts Tech Co., Ltd. | Vehicle seat |
-
1986
- 1986-07-02 JP JP10248186U patent/JPS639130U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0290845U (de) * | 1988-12-30 | 1990-07-18 | ||
| US11730281B2 (en) | 2019-02-01 | 2023-08-22 | Ts Tech Co., Ltd. | Vehicle seat |