JPS63172131U - - Google Patents
Info
- Publication number
- JPS63172131U JPS63172131U JP6604787U JP6604787U JPS63172131U JP S63172131 U JPS63172131 U JP S63172131U JP 6604787 U JP6604787 U JP 6604787U JP 6604787 U JP6604787 U JP 6604787U JP S63172131 U JPS63172131 U JP S63172131U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transfer arm
- spin chuck
- wafer carrier
- takes out
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6604787U JPS63172131U (de) | 1987-04-30 | 1987-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6604787U JPS63172131U (de) | 1987-04-30 | 1987-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63172131U true JPS63172131U (de) | 1988-11-09 |
Family
ID=30903684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6604787U Pending JPS63172131U (de) | 1987-04-30 | 1987-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63172131U (de) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02292196A (ja) * | 1989-04-28 | 1990-12-03 | Nidek Co Ltd | ウェーハ搬送装置 |
| JPH07273171A (ja) * | 1994-03-30 | 1995-10-20 | Tokyo Koku Keiki Kk | 円盤状物体の取り扱い装置 |
| JP2003075121A (ja) * | 2001-09-07 | 2003-03-12 | Toshiba Ceramics Co Ltd | 方形ガラス板の形状測定装置 |
-
1987
- 1987-04-30 JP JP6604787U patent/JPS63172131U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02292196A (ja) * | 1989-04-28 | 1990-12-03 | Nidek Co Ltd | ウェーハ搬送装置 |
| JPH07273171A (ja) * | 1994-03-30 | 1995-10-20 | Tokyo Koku Keiki Kk | 円盤状物体の取り扱い装置 |
| JP2003075121A (ja) * | 2001-09-07 | 2003-03-12 | Toshiba Ceramics Co Ltd | 方形ガラス板の形状測定装置 |
| JP4627938B2 (ja) * | 2001-09-07 | 2011-02-09 | コバレントマテリアル株式会社 | 方形ガラス板の形状測定装置 |