JPH0359635U - - Google Patents
Info
- Publication number
- JPH0359635U JPH0359635U JP11967189U JP11967189U JPH0359635U JP H0359635 U JPH0359635 U JP H0359635U JP 11967189 U JP11967189 U JP 11967189U JP 11967189 U JP11967189 U JP 11967189U JP H0359635 U JPH0359635 U JP H0359635U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- lifting pin
- spinner
- baking device
- gripping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11967189U JPH0359635U (de) | 1989-10-16 | 1989-10-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11967189U JPH0359635U (de) | 1989-10-16 | 1989-10-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0359635U true JPH0359635U (de) | 1991-06-12 |
Family
ID=31667781
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11967189U Pending JPH0359635U (de) | 1989-10-16 | 1989-10-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0359635U (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012031603A (ja) * | 2010-07-29 | 2012-02-16 | xi-wu Jiang | ロック装置 |
-
1989
- 1989-10-16 JP JP11967189U patent/JPH0359635U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012031603A (ja) * | 2010-07-29 | 2012-02-16 | xi-wu Jiang | ロック装置 |