JPS63178331U - - Google Patents
Info
- Publication number
- JPS63178331U JPS63178331U JP6983787U JP6983787U JPS63178331U JP S63178331 U JPS63178331 U JP S63178331U JP 6983787 U JP6983787 U JP 6983787U JP 6983787 U JP6983787 U JP 6983787U JP S63178331 U JPS63178331 U JP S63178331U
- Authority
- JP
- Japan
- Prior art keywords
- transfer
- wafer
- suction section
- transfer device
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6983787U JPS63178331U (de) | 1987-05-11 | 1987-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6983787U JPS63178331U (de) | 1987-05-11 | 1987-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63178331U true JPS63178331U (de) | 1988-11-18 |
Family
ID=30910923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6983787U Pending JPS63178331U (de) | 1987-05-11 | 1987-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63178331U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02291144A (ja) * | 1989-05-01 | 1990-11-30 | Nidek Co Ltd | ウェーハ搬送装置 |
| JPH02292196A (ja) * | 1989-04-28 | 1990-12-03 | Nidek Co Ltd | ウェーハ搬送装置 |
-
1987
- 1987-05-11 JP JP6983787U patent/JPS63178331U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02292196A (ja) * | 1989-04-28 | 1990-12-03 | Nidek Co Ltd | ウェーハ搬送装置 |
| JPH02291144A (ja) * | 1989-05-01 | 1990-11-30 | Nidek Co Ltd | ウェーハ搬送装置 |