JPS63134543U - - Google Patents
Info
- Publication number
- JPS63134543U JPS63134543U JP2575487U JP2575487U JPS63134543U JP S63134543 U JPS63134543 U JP S63134543U JP 2575487 U JP2575487 U JP 2575487U JP 2575487 U JP2575487 U JP 2575487U JP S63134543 U JPS63134543 U JP S63134543U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transport device
- sheet
- frame
- transports
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000032258 transport Effects 0.000 claims 3
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2575487U JPS63134543U (de) | 1987-02-24 | 1987-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2575487U JPS63134543U (de) | 1987-02-24 | 1987-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63134543U true JPS63134543U (de) | 1988-09-02 |
Family
ID=30826201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2575487U Pending JPS63134543U (de) | 1987-02-24 | 1987-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63134543U (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59935A (ja) * | 1982-06-25 | 1984-01-06 | Toshiba Corp | カセツトリング搬送装置 |
-
1987
- 1987-02-24 JP JP2575487U patent/JPS63134543U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59935A (ja) * | 1982-06-25 | 1984-01-06 | Toshiba Corp | カセツトリング搬送装置 |