JPS6351445U - - Google Patents
Info
- Publication number
- JPS6351445U JPS6351445U JP14560486U JP14560486U JPS6351445U JP S6351445 U JPS6351445 U JP S6351445U JP 14560486 U JP14560486 U JP 14560486U JP 14560486 U JP14560486 U JP 14560486U JP S6351445 U JPS6351445 U JP S6351445U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transport belt
- semiconductor wafer
- transport
- transports
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000032258 transport Effects 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14560486U JPS6351445U (de) | 1986-09-22 | 1986-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14560486U JPS6351445U (de) | 1986-09-22 | 1986-09-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6351445U true JPS6351445U (de) | 1988-04-07 |
Family
ID=31057298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14560486U Pending JPS6351445U (de) | 1986-09-22 | 1986-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6351445U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014155006A1 (fr) * | 2013-03-28 | 2014-10-02 | Vit | Courroie pour installation de convoyage |
-
1986
- 1986-09-22 JP JP14560486U patent/JPS6351445U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014155006A1 (fr) * | 2013-03-28 | 2014-10-02 | Vit | Courroie pour installation de convoyage |