JPH0395633U - - Google Patents
Info
- Publication number
- JPH0395633U JPH0395633U JP93890U JP93890U JPH0395633U JP H0395633 U JPH0395633 U JP H0395633U JP 93890 U JP93890 U JP 93890U JP 93890 U JP93890 U JP 93890U JP H0395633 U JPH0395633 U JP H0395633U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrates
- cleaning
- rotor
- drying
- drying apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000004140 cleaning Methods 0.000 claims description 7
- 238000001035 drying Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP93890U JPH0395633U (de) | 1990-01-11 | 1990-01-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP93890U JPH0395633U (de) | 1990-01-11 | 1990-01-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0395633U true JPH0395633U (de) | 1991-09-30 |
Family
ID=31504872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP93890U Pending JPH0395633U (de) | 1990-01-11 | 1990-01-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0395633U (de) |
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1990
- 1990-01-11 JP JP93890U patent/JPH0395633U/ja active Pending