JPS62170503U - - Google Patents
Info
- Publication number
- JPS62170503U JPS62170503U JP5744286U JP5744286U JPS62170503U JP S62170503 U JPS62170503 U JP S62170503U JP 5744286 U JP5744286 U JP 5744286U JP 5744286 U JP5744286 U JP 5744286U JP S62170503 U JPS62170503 U JP S62170503U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- reflecting mirror
- moving device
- laser
- detaches
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims 1
- 238000000609 electron-beam lithography Methods 0.000 description 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5744286U JPS62170503U (de) | 1986-04-18 | 1986-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5744286U JPS62170503U (de) | 1986-04-18 | 1986-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62170503U true JPS62170503U (de) | 1987-10-29 |
Family
ID=30887145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5744286U Pending JPS62170503U (de) | 1986-04-18 | 1986-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62170503U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014173885A (ja) * | 2013-03-06 | 2014-09-22 | Ebara Corp | 測長計の設置構造 |
-
1986
- 1986-04-18 JP JP5744286U patent/JPS62170503U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014173885A (ja) * | 2013-03-06 | 2014-09-22 | Ebara Corp | 測長計の設置構造 |