JPS622244U - - Google Patents

Info

Publication number
JPS622244U
JPS622244U JP9151585U JP9151585U JPS622244U JP S622244 U JPS622244 U JP S622244U JP 9151585 U JP9151585 U JP 9151585U JP 9151585 U JP9151585 U JP 9151585U JP S622244 U JPS622244 U JP S622244U
Authority
JP
Japan
Prior art keywords
plasma generation
waveguide
microwave
generation device
generation section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9151585U
Other languages
English (en)
Other versions
JPH0622981Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985091515U priority Critical patent/JPH0622981Y2/ja
Publication of JPS622244U publication Critical patent/JPS622244U/ja
Application granted granted Critical
Publication of JPH0622981Y2 publication Critical patent/JPH0622981Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は本考案の一実施例に係るプラズマ発生
装置の構成を示す断面図、第２図は上記装置の作
用を説明するための図である。 １２……導波管、１３……プラズマ発生部、２
１……ダミーロード、２２……アイソレータ、２
３，２４，２５……整合用ねじ、２６……スリー
スタブチユーナー、２７……短絡板、２８……石
英管、２９……固定部材、３１……ガス導入管、
３２……ガス排出管、Ｇ……反応性ガス。

Claims (1)

    【実用新案登録請求の範囲】
  1. マイクロ波発生源と、このマイクロ波発生源か
    らのマイクロ波を導く導波管と、この導波管の中
    途位置に配置されたプラズマ発生部とを具備して
    なるプラズマ発生装置において、前記導波管の終
    端部に、焦点位置を前記プラズマ発生部の中心に
    設定した放物面からなる短絡板を設けたことを特
    徴とするプラズマ発生装置。
JP1985091515U 1985-06-19 1985-06-19 プラズマ発生装置 Expired - Lifetime JPH0622981Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985091515U JPH0622981Y2 (ja) 1985-06-19 1985-06-19 プラズマ発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985091515U JPH0622981Y2 (ja) 1985-06-19 1985-06-19 プラズマ発生装置

Publications (2)

Publication Number Publication Date
JPS622244U true JPS622244U (ja) 1987-01-08
JPH0622981Y2 JPH0622981Y2 (ja) 1994-06-15

Family

ID=30647474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985091515U Expired - Lifetime JPH0622981Y2 (ja) 1985-06-19 1985-06-19 プラズマ発生装置

Country Status (1)

Country Link
JP (1) JPH0622981Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016119325A (ja) * 2014-12-18 2016-06-30 東京エレクトロン株式会社 プラズマ処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56147438A (en) * 1980-04-16 1981-11-16 Fujitsu Ltd Microplasma treatment apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56147438A (en) * 1980-04-16 1981-11-16 Fujitsu Ltd Microplasma treatment apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016119325A (ja) * 2014-12-18 2016-06-30 東京エレクトロン株式会社 プラズマ処理装置

Also Published As

Publication number Publication date
JPH0622981Y2 (ja) 1994-06-15

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