JPS6222314A - 薄膜製造方法 - Google Patents
薄膜製造方法Info
- Publication number
- JPS6222314A JPS6222314A JP60160216A JP16021685A JPS6222314A JP S6222314 A JPS6222314 A JP S6222314A JP 60160216 A JP60160216 A JP 60160216A JP 16021685 A JP16021685 A JP 16021685A JP S6222314 A JPS6222314 A JP S6222314A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- insulating
- metal
- coated
- compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/027—Graded interfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Insulating Bodies (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60160216A JPS6222314A (ja) | 1985-07-22 | 1985-07-22 | 薄膜製造方法 |
DE19863624772 DE3624772A1 (de) | 1985-07-22 | 1986-07-22 | Verfahren zum herstellen eines duennfilms |
GB08617904A GB2178064A (en) | 1985-07-22 | 1986-07-22 | Producing a thin film by reactive evaporation |
KR1019860005952A KR920000590B1 (ko) | 1985-07-22 | 1986-07-22 | 박막 제조방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60160216A JPS6222314A (ja) | 1985-07-22 | 1985-07-22 | 薄膜製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6222314A true JPS6222314A (ja) | 1987-01-30 |
JPH0467724B2 JPH0467724B2 (ko) | 1992-10-29 |
Family
ID=15710240
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60160216A Granted JPS6222314A (ja) | 1985-07-22 | 1985-07-22 | 薄膜製造方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS6222314A (ko) |
KR (1) | KR920000590B1 (ko) |
DE (1) | DE3624772A1 (ko) |
GB (1) | GB2178064A (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63303054A (ja) * | 1987-06-04 | 1988-12-09 | Toyota Motor Corp | 多層膜の形成方法 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3726731A1 (de) * | 1987-08-11 | 1989-02-23 | Hartec Ges Fuer Hartstoffe Und | Verfahren zum aufbringen von ueberzuegen auf gegenstaende mittels magnetfeldunterstuetzter kathodenzerstaeubung im vakuum |
DE3737404A1 (de) * | 1987-11-04 | 1989-05-18 | Bartl Josef Franz | Verfahren und einrichtung zur erzeugung haftfester vakuumbeschichtungen |
GB9005321D0 (en) * | 1990-03-09 | 1990-05-02 | Matthews Allan | Modulated structure composites produced by vapour disposition |
JPH04368A (ja) * | 1990-04-17 | 1992-01-06 | Riken Corp | 耐摩耗性被膜及びその製造法 |
EP0657562B1 (en) * | 1993-11-12 | 2001-09-12 | PPG Industries Ohio, Inc. | Durable sputtered metal oxide coating |
US5672386A (en) * | 1994-10-27 | 1997-09-30 | Kabushiki Kaisha Riken | Process for forming a coating of chromium and nitrogen having good wear resistance properties |
US5587227A (en) * | 1994-10-27 | 1996-12-24 | Kabushiki Kaisha Riken | Coating of chromium and nitrogen having good wear resistance properties |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3791852A (en) * | 1972-06-16 | 1974-02-12 | Univ California | High rate deposition of carbides by activated reactive evaporation |
JPS5941510B2 (ja) * | 1979-07-24 | 1984-10-08 | 双葉電子工業株式会社 | 酸化ベリリウム膜とその形成方法 |
JPS58221271A (ja) * | 1982-06-18 | 1983-12-22 | Citizen Watch Co Ltd | イオンプレ−テイング法による被膜形成方法 |
JPS60234965A (ja) * | 1984-05-04 | 1985-11-21 | Diesel Kiki Co Ltd | 薄膜製造方法 |
-
1985
- 1985-07-22 JP JP60160216A patent/JPS6222314A/ja active Granted
-
1986
- 1986-07-22 KR KR1019860005952A patent/KR920000590B1/ko not_active IP Right Cessation
- 1986-07-22 GB GB08617904A patent/GB2178064A/en not_active Withdrawn
- 1986-07-22 DE DE19863624772 patent/DE3624772A1/de active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63303054A (ja) * | 1987-06-04 | 1988-12-09 | Toyota Motor Corp | 多層膜の形成方法 |
Also Published As
Publication number | Publication date |
---|---|
KR920000590B1 (ko) | 1992-01-16 |
GB2178064A (en) | 1987-02-04 |
KR870001326A (ko) | 1987-03-13 |
DE3624772A1 (de) | 1987-01-22 |
JPH0467724B2 (ko) | 1992-10-29 |
GB8617904D0 (en) | 1986-08-28 |
DE3624772C2 (ko) | 1988-07-21 |
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