JPS6221270B2 - - Google Patents

Info

Publication number
JPS6221270B2
JPS6221270B2 JP55127109A JP12710980A JPS6221270B2 JP S6221270 B2 JPS6221270 B2 JP S6221270B2 JP 55127109 A JP55127109 A JP 55127109A JP 12710980 A JP12710980 A JP 12710980A JP S6221270 B2 JPS6221270 B2 JP S6221270B2
Authority
JP
Japan
Prior art keywords
region
silicon
porous silicon
porous
silicon oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55127109A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5752150A (en
Inventor
Kazuo Imai
Susumu Muramoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP55127109A priority Critical patent/JPS5752150A/ja
Publication of JPS5752150A publication Critical patent/JPS5752150A/ja
Publication of JPS6221270B2 publication Critical patent/JPS6221270B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76264—SOI together with lateral isolation, e.g. using local oxidation of silicon, or dielectric or polycristalline material refilled trench or air gap isolation regions, e.g. completely isolated semiconductor islands
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76264—SOI together with lateral isolation, e.g. using local oxidation of silicon, or dielectric or polycristalline material refilled trench or air gap isolation regions, e.g. completely isolated semiconductor islands
    • H01L21/7627—Vertical isolation by full isolation by porous oxide silicon, i.e. FIPOS techniques
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76264—SOI together with lateral isolation, e.g. using local oxidation of silicon, or dielectric or polycristalline material refilled trench or air gap isolation regions, e.g. completely isolated semiconductor islands
    • H01L21/76281—Lateral isolation by selective oxidation of silicon

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Bipolar Transistors (AREA)
JP55127109A 1980-09-16 1980-09-16 Semiconductor device with element forming region surrounded by porous silicon oxide Granted JPS5752150A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55127109A JPS5752150A (en) 1980-09-16 1980-09-16 Semiconductor device with element forming region surrounded by porous silicon oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55127109A JPS5752150A (en) 1980-09-16 1980-09-16 Semiconductor device with element forming region surrounded by porous silicon oxide

Publications (2)

Publication Number Publication Date
JPS5752150A JPS5752150A (en) 1982-03-27
JPS6221270B2 true JPS6221270B2 (cg-RX-API-DMAC7.html) 1987-05-12

Family

ID=14951820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55127109A Granted JPS5752150A (en) 1980-09-16 1980-09-16 Semiconductor device with element forming region surrounded by porous silicon oxide

Country Status (1)

Country Link
JP (1) JPS5752150A (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63158869A (ja) * 1986-12-23 1988-07-01 Oki Electric Ind Co Ltd 半導体メモリ装置
WO2004036650A1 (en) * 2002-08-05 2004-04-29 Telephus Inc. High frequency semiconductor device and producing the same
DE10320201A1 (de) * 2003-05-07 2004-12-02 Robert Bosch Gmbh Vorrichtung mit einer Halbleiterschaltung

Also Published As

Publication number Publication date
JPS5752150A (en) 1982-03-27

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