JPS6220869A - 薄膜形成方法 - Google Patents
薄膜形成方法Info
- Publication number
- JPS6220869A JPS6220869A JP15831585A JP15831585A JPS6220869A JP S6220869 A JPS6220869 A JP S6220869A JP 15831585 A JP15831585 A JP 15831585A JP 15831585 A JP15831585 A JP 15831585A JP S6220869 A JPS6220869 A JP S6220869A
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- thin film
- sputtering
- roll
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 41
- 230000015572 biosynthetic process Effects 0.000 title claims description 12
- 239000010408 film Substances 0.000 claims abstract description 95
- 239000000758 substrate Substances 0.000 claims abstract description 44
- 230000005291 magnetic effect Effects 0.000 claims abstract description 23
- 238000000034 method Methods 0.000 claims description 25
- 229920006254 polymer film Polymers 0.000 claims description 12
- 238000009751 slip forming Methods 0.000 claims description 6
- 238000005289 physical deposition Methods 0.000 claims description 3
- 238000005096 rolling process Methods 0.000 claims description 3
- 238000005234 chemical deposition Methods 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 abstract description 34
- -1 polyethylene phthalate Polymers 0.000 abstract description 5
- 238000004804 winding Methods 0.000 abstract description 5
- 239000002120 nanofilm Substances 0.000 abstract 2
- 230000037303 wrinkles Effects 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 229910000889 permalloy Inorganic materials 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 239000002952 polymeric resin Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229920002292 Nylon 6 Polymers 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 229920005570 flexible polymer Polymers 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15831585A JPS6220869A (ja) | 1985-07-19 | 1985-07-19 | 薄膜形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15831585A JPS6220869A (ja) | 1985-07-19 | 1985-07-19 | 薄膜形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6220869A true JPS6220869A (ja) | 1987-01-29 |
| JPH0323632B2 JPH0323632B2 (enrdf_load_stackoverflow) | 1991-03-29 |
Family
ID=15668946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15831585A Granted JPS6220869A (ja) | 1985-07-19 | 1985-07-19 | 薄膜形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6220869A (enrdf_load_stackoverflow) |
-
1985
- 1985-07-19 JP JP15831585A patent/JPS6220869A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0323632B2 (enrdf_load_stackoverflow) | 1991-03-29 |
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