JPS6220687B2 - - Google Patents
Info
- Publication number
- JPS6220687B2 JPS6220687B2 JP60056908A JP5690885A JPS6220687B2 JP S6220687 B2 JPS6220687 B2 JP S6220687B2 JP 60056908 A JP60056908 A JP 60056908A JP 5690885 A JP5690885 A JP 5690885A JP S6220687 B2 JPS6220687 B2 JP S6220687B2
- Authority
- JP
- Japan
- Prior art keywords
- copper
- soaking
- tube
- ppm
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Carbon And Carbon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60056908A JPS60258918A (ja) | 1985-03-20 | 1985-03-20 | ガス不透過性半導体製造用ＳｉＣ−Ｓｉ系均熱管の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60056908A JPS60258918A (ja) | 1985-03-20 | 1985-03-20 | ガス不透過性半導体製造用ＳｉＣ−Ｓｉ系均熱管の製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9823075A Division JPS5222477A (en) | 1975-08-13 | 1975-08-13 | Sic-si type equalizing tube for manufacturing gas impermeable semi conductors |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60258918A JPS60258918A (ja) | 1985-12-20 |
| JPS6220687B2 true JPS6220687B2 (enrdf_load_stackoverflow) | 1987-05-08 |
Family
ID=13040552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60056908A Granted JPS60258918A (ja) | 1985-03-20 | 1985-03-20 | ガス不透過性半導体製造用ＳｉＣ−Ｓｉ系均熱管の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60258918A (enrdf_load_stackoverflow) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5075600A (enrdf_load_stackoverflow) * | 1973-11-08 | 1975-06-20 | ||
| US3951587A (en) * | 1974-12-06 | 1976-04-20 | Norton Company | Silicon carbide diffusion furnace components |
| JPS5222477A (en) * | 1975-08-13 | 1977-02-19 | Toshiba Ceramics Co Ltd | Sic-si type equalizing tube for manufacturing gas impermeable semi conductors |
| JPS5722914A (en) * | 1980-07-16 | 1982-02-06 | Nissan Motor Co Ltd | Engine mount for auto-vehicle |
| JPS5745708A (en) * | 1980-09-03 | 1982-03-15 | Hitachi Ltd | Amplifying circuit |
-
1985
- 1985-03-20 JP JP60056908A patent/JPS60258918A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60258918A (ja) | 1985-12-20 |
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