JPS6219732U - - Google Patents

Info

Publication number
JPS6219732U
JPS6219732U JP11099885U JP11099885U JPS6219732U JP S6219732 U JPS6219732 U JP S6219732U JP 11099885 U JP11099885 U JP 11099885U JP 11099885 U JP11099885 U JP 11099885U JP S6219732 U JPS6219732 U JP S6219732U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
support rods
heat treatment
boat
attachment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11099885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11099885U priority Critical patent/JPS6219732U/ja
Publication of JPS6219732U publication Critical patent/JPS6219732U/ja
Pending legal-status Critical Current

Links

JP11099885U 1985-07-22 1985-07-22 Pending JPS6219732U (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11099885U JPS6219732U (en:Method) 1985-07-22 1985-07-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11099885U JPS6219732U (en:Method) 1985-07-22 1985-07-22

Publications (1)

Publication Number Publication Date
JPS6219732U true JPS6219732U (en:Method) 1987-02-05

Family

ID=30990513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11099885U Pending JPS6219732U (en:Method) 1985-07-22 1985-07-22

Country Status (1)

Country Link
JP (1) JPS6219732U (en:Method)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63217622A (ja) * 1987-03-06 1988-09-09 Toshiba Ceramics Co Ltd ウエ−ハ熱処理用炭化珪素質治具
JPS63278225A (ja) * 1987-05-08 1988-11-15 Teru Sagami Kk 熱処理用ボ−ト
JPH01315137A (ja) * 1988-06-15 1989-12-20 Tel Sagami Ltd プラズマ処理方法及び縦型熱処理装置
JPH069139U (ja) * 1992-07-03 1994-02-04 国際電気株式会社 ウェーハ保持装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63217622A (ja) * 1987-03-06 1988-09-09 Toshiba Ceramics Co Ltd ウエ−ハ熱処理用炭化珪素質治具
JPS63278225A (ja) * 1987-05-08 1988-11-15 Teru Sagami Kk 熱処理用ボ−ト
JPH01315137A (ja) * 1988-06-15 1989-12-20 Tel Sagami Ltd プラズマ処理方法及び縦型熱処理装置
JPH069139U (ja) * 1992-07-03 1994-02-04 国際電気株式会社 ウェーハ保持装置

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