JPS63170464U - - Google Patents
Info
- Publication number
- JPS63170464U JPS63170464U JP6168887U JP6168887U JPS63170464U JP S63170464 U JPS63170464 U JP S63170464U JP 6168887 U JP6168887 U JP 6168887U JP 6168887 U JP6168887 U JP 6168887U JP S63170464 U JPS63170464 U JP S63170464U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holder
- grooves
- supported
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 14
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6168887U JPH0441173Y2 (en:Method) | 1987-04-22 | 1987-04-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6168887U JPH0441173Y2 (en:Method) | 1987-04-22 | 1987-04-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63170464U true JPS63170464U (en:Method) | 1988-11-07 |
| JPH0441173Y2 JPH0441173Y2 (en:Method) | 1992-09-28 |
Family
ID=30895261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6168887U Expired JPH0441173Y2 (en:Method) | 1987-04-22 | 1987-04-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0441173Y2 (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02114938U (en:Method) * | 1989-03-03 | 1990-09-14 | ||
| JP2002060947A (ja) * | 2000-07-07 | 2002-02-28 | Asm Internatl Nv | 原子層のｃｖｄ |
-
1987
- 1987-04-22 JP JP6168887U patent/JPH0441173Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02114938U (en:Method) * | 1989-03-03 | 1990-09-14 | ||
| JP2002060947A (ja) * | 2000-07-07 | 2002-02-28 | Asm Internatl Nv | 原子層のｃｖｄ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0441173Y2 (en:Method) | 1992-09-28 |