JPS62188775U - - Google Patents

Info

Publication number
JPS62188775U
JPS62188775U JP7641186U JP7641186U JPS62188775U JP S62188775 U JPS62188775 U JP S62188775U JP 7641186 U JP7641186 U JP 7641186U JP 7641186 U JP7641186 U JP 7641186U JP S62188775 U JPS62188775 U JP S62188775U
Authority
JP
Japan
Prior art keywords
substrate
original
holding body
exposure apparatus
moving device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7641186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7641186U priority Critical patent/JPS62188775U/ja
Priority to US07/005,858 priority patent/US4842412A/en
Publication of JPS62188775U publication Critical patent/JPS62188775U/ja
Pending legal-status Critical Current

Links

JP7641186U 1986-01-22 1986-05-20 Pending JPS62188775U (OSRAM)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP7641186U JPS62188775U (OSRAM) 1986-05-20 1986-05-20
US07/005,858 US4842412A (en) 1986-01-22 1987-01-21 Exposure apparatus employed for fabricating printed circuit boards

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7641186U JPS62188775U (OSRAM) 1986-05-20 1986-05-20

Publications (1)

Publication Number Publication Date
JPS62188775U true JPS62188775U (OSRAM) 1987-12-01

Family

ID=30923462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7641186U Pending JPS62188775U (OSRAM) 1986-01-22 1986-05-20

Country Status (1)

Country Link
JP (1) JPS62188775U (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0349548U (OSRAM) * 1989-09-19 1991-05-15

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53143877A (en) * 1977-05-21 1978-12-14 Mitsubishi Electric Corp Automatic positioning device of pattern

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53143877A (en) * 1977-05-21 1978-12-14 Mitsubishi Electric Corp Automatic positioning device of pattern

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0349548U (OSRAM) * 1989-09-19 1991-05-15

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