JPS62188127A - イオン源 - Google Patents

イオン源

Info

Publication number
JPS62188127A
JPS62188127A JP62035504A JP3550487A JPS62188127A JP S62188127 A JPS62188127 A JP S62188127A JP 62035504 A JP62035504 A JP 62035504A JP 3550487 A JP3550487 A JP 3550487A JP S62188127 A JPS62188127 A JP S62188127A
Authority
JP
Japan
Prior art keywords
ion
electrode
ion source
needle
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62035504A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0151849B2 (enrdf_load_stackoverflow
Inventor
Hifumi Tamura
田村　一二三
Toru Ishitani
亨 石谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62035504A priority Critical patent/JPS62188127A/ja
Publication of JPS62188127A publication Critical patent/JPS62188127A/ja
Publication of JPH0151849B2 publication Critical patent/JPH0151849B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP62035504A 1987-02-20 1987-02-20 イオン源 Granted JPS62188127A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62035504A JPS62188127A (ja) 1987-02-20 1987-02-20 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62035504A JPS62188127A (ja) 1987-02-20 1987-02-20 イオン源

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP59027046A Division JPS59160941A (ja) 1984-02-17 1984-02-17 イオン源

Publications (2)

Publication Number Publication Date
JPS62188127A true JPS62188127A (ja) 1987-08-17
JPH0151849B2 JPH0151849B2 (enrdf_load_stackoverflow) 1989-11-07

Family

ID=12443586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62035504A Granted JPS62188127A (ja) 1987-02-20 1987-02-20 イオン源

Country Status (1)

Country Link
JP (1) JPS62188127A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003524182A (ja) * 2000-02-25 2003-08-12 エフ・イ−・アイ・カンパニー 基板の断面の画像化装置
WO2005031788A3 (en) * 2003-09-22 2005-10-06 Applied Materials Israel Ltd A source of liquid metal ions and a method for controlling the source

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003524182A (ja) * 2000-02-25 2003-08-12 エフ・イ−・アイ・カンパニー 基板の断面の画像化装置
WO2005031788A3 (en) * 2003-09-22 2005-10-06 Applied Materials Israel Ltd A source of liquid metal ions and a method for controlling the source

Also Published As

Publication number Publication date
JPH0151849B2 (enrdf_load_stackoverflow) 1989-11-07

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