JPS6363105B2 - - Google Patents

Info

Publication number
JPS6363105B2
JPS6363105B2 JP59027046A JP2704684A JPS6363105B2 JP S6363105 B2 JPS6363105 B2 JP S6363105B2 JP 59027046 A JP59027046 A JP 59027046A JP 2704684 A JP2704684 A JP 2704684A JP S6363105 B2 JPS6363105 B2 JP S6363105B2
Authority
JP
Japan
Prior art keywords
ion
electrode
ion source
substance
ionized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59027046A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59160941A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP59027046A priority Critical patent/JPS59160941A/ja
Publication of JPS59160941A publication Critical patent/JPS59160941A/ja
Publication of JPS6363105B2 publication Critical patent/JPS6363105B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59027046A 1984-02-17 1984-02-17 イオン源 Granted JPS59160941A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59027046A JPS59160941A (ja) 1984-02-17 1984-02-17 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59027046A JPS59160941A (ja) 1984-02-17 1984-02-17 イオン源

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP62035504A Division JPS62188127A (ja) 1987-02-20 1987-02-20 イオン源

Publications (2)

Publication Number Publication Date
JPS59160941A JPS59160941A (ja) 1984-09-11
JPS6363105B2 true JPS6363105B2 (enrdf_load_stackoverflow) 1988-12-06

Family

ID=12210127

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59027046A Granted JPS59160941A (ja) 1984-02-17 1984-02-17 イオン源

Country Status (1)

Country Link
JP (1) JPS59160941A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4760262A (en) * 1987-05-12 1988-07-26 Eaton Corporation Ion source
US6727500B1 (en) * 2000-02-25 2004-04-27 Fei Company System for imaging a cross-section of a substrate
EP1683163B1 (en) 2003-10-17 2012-02-22 Fei Company Charged particle extraction device and method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5035435U (enrdf_load_stackoverflow) * 1973-08-02 1975-04-15
JPS5833649B2 (ja) * 1975-07-08 1983-07-21 昌徳 古室 イオン発生装置
JPS593814B2 (ja) * 1976-06-09 1984-01-26 株式会社日立製作所 固体イオン源

Also Published As

Publication number Publication date
JPS59160941A (ja) 1984-09-11

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