JPH0151849B2 - - Google Patents

Info

Publication number
JPH0151849B2
JPH0151849B2 JP62035504A JP3550487A JPH0151849B2 JP H0151849 B2 JPH0151849 B2 JP H0151849B2 JP 62035504 A JP62035504 A JP 62035504A JP 3550487 A JP3550487 A JP 3550487A JP H0151849 B2 JPH0151849 B2 JP H0151849B2
Authority
JP
Japan
Prior art keywords
ion
needle
ion source
electrode
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP62035504A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62188127A (ja
Inventor
Hifumi Tamura
Tooru Ishitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62035504A priority Critical patent/JPS62188127A/ja
Publication of JPS62188127A publication Critical patent/JPS62188127A/ja
Publication of JPH0151849B2 publication Critical patent/JPH0151849B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP62035504A 1987-02-20 1987-02-20 イオン源 Granted JPS62188127A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62035504A JPS62188127A (ja) 1987-02-20 1987-02-20 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62035504A JPS62188127A (ja) 1987-02-20 1987-02-20 イオン源

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP59027046A Division JPS59160941A (ja) 1984-02-17 1984-02-17 イオン源

Publications (2)

Publication Number Publication Date
JPS62188127A JPS62188127A (ja) 1987-08-17
JPH0151849B2 true JPH0151849B2 (enrdf_load_stackoverflow) 1989-11-07

Family

ID=12443586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62035504A Granted JPS62188127A (ja) 1987-02-20 1987-02-20 イオン源

Country Status (1)

Country Link
JP (1) JPS62188127A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6727500B1 (en) * 2000-02-25 2004-04-27 Fei Company System for imaging a cross-section of a substrate
US6914386B2 (en) * 2003-06-20 2005-07-05 Applied Materials Israel, Ltd. Source of liquid metal ions and a method for controlling the source

Also Published As

Publication number Publication date
JPS62188127A (ja) 1987-08-17

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