JPS62187680U - - Google Patents

Info

Publication number
JPS62187680U
JPS62187680U JP7464386U JP7464386U JPS62187680U JP S62187680 U JPS62187680 U JP S62187680U JP 7464386 U JP7464386 U JP 7464386U JP 7464386 U JP7464386 U JP 7464386U JP S62187680 U JPS62187680 U JP S62187680U
Authority
JP
Japan
Prior art keywords
substrate
processing liquid
spray device
main surface
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7464386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0446860Y2 (h
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986074643U priority Critical patent/JPH0446860Y2/ja
Publication of JPS62187680U publication Critical patent/JPS62187680U/ja
Application granted granted Critical
Publication of JPH0446860Y2 publication Critical patent/JPH0446860Y2/ja
Expired legal-status Critical Current

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  • Coating Apparatus (AREA)
JP1986074643U 1986-05-20 1986-05-20 Expired JPH0446860Y2 (h)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986074643U JPH0446860Y2 (h) 1986-05-20 1986-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986074643U JPH0446860Y2 (h) 1986-05-20 1986-05-20

Publications (2)

Publication Number Publication Date
JPS62187680U true JPS62187680U (h) 1987-11-28
JPH0446860Y2 JPH0446860Y2 (h) 1992-11-05

Family

ID=30920044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986074643U Expired JPH0446860Y2 (h) 1986-05-20 1986-05-20

Country Status (1)

Country Link
JP (1) JPH0446860Y2 (h)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0345631U (h) * 1989-09-13 1991-04-26
JPH05208163A (ja) * 1991-10-29 1993-08-20 Internatl Business Mach Corp <Ibm> スピン・コーティング装置および方法
WO2003105201A1 (ja) * 2002-06-07 2003-12-18 東京エレクトロン株式会社 基板処理装置、基板処理方法及び現像装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5564234A (en) * 1978-11-06 1980-05-14 Mitsubishi Electric Corp Developing method of resist film
JPS5575223A (en) * 1978-12-04 1980-06-06 Fujitsu Ltd Manufacturing semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5564234A (en) * 1978-11-06 1980-05-14 Mitsubishi Electric Corp Developing method of resist film
JPS5575223A (en) * 1978-12-04 1980-06-06 Fujitsu Ltd Manufacturing semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0345631U (h) * 1989-09-13 1991-04-26
JPH05208163A (ja) * 1991-10-29 1993-08-20 Internatl Business Mach Corp <Ibm> スピン・コーティング装置および方法
WO2003105201A1 (ja) * 2002-06-07 2003-12-18 東京エレクトロン株式会社 基板処理装置、基板処理方法及び現像装置

Also Published As

Publication number Publication date
JPH0446860Y2 (h) 1992-11-05

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