JPS62187345A - レジスト処理方法 - Google Patents

レジスト処理方法

Info

Publication number
JPS62187345A
JPS62187345A JP61028774A JP2877486A JPS62187345A JP S62187345 A JPS62187345 A JP S62187345A JP 61028774 A JP61028774 A JP 61028774A JP 2877486 A JP2877486 A JP 2877486A JP S62187345 A JPS62187345 A JP S62187345A
Authority
JP
Japan
Prior art keywords
photoresist
irradiation
resist
processing
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61028774A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0574060B2 (enExample
Inventor
Kazuya Tanaka
一也 田中
Kazuyoshi Ueki
植木　和義
Hiroko Suzuki
裕子 鈴木
Yoshiki Mimura
芳樹 三村
Shinji Suzuki
信二 鈴木
Shinji Sugioka
晋次 杉岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
Original Assignee
Ushio Denki KK
Ushio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=12257754&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPS62187345(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Ushio Denki KK, Ushio Inc filed Critical Ushio Denki KK
Priority to JP61028774A priority Critical patent/JPS62187345A/ja
Priority to EP19860116308 priority patent/EP0233333B1/en
Priority to DE19863687749 priority patent/DE3687749T2/de
Publication of JPS62187345A publication Critical patent/JPS62187345A/ja
Publication of JPH0574060B2 publication Critical patent/JPH0574060B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP61028774A 1986-02-14 1986-02-14 レジスト処理方法 Granted JPS62187345A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP61028774A JPS62187345A (ja) 1986-02-14 1986-02-14 レジスト処理方法
EP19860116308 EP0233333B1 (en) 1986-02-14 1986-11-25 Method of treating photoresists
DE19863687749 DE3687749T2 (de) 1986-02-14 1986-11-25 Photolack-behandlungsverfahren.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61028774A JPS62187345A (ja) 1986-02-14 1986-02-14 レジスト処理方法

Publications (2)

Publication Number Publication Date
JPS62187345A true JPS62187345A (ja) 1987-08-15
JPH0574060B2 JPH0574060B2 (enExample) 1993-10-15

Family

ID=12257754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61028774A Granted JPS62187345A (ja) 1986-02-14 1986-02-14 レジスト処理方法

Country Status (3)

Country Link
EP (1) EP0233333B1 (enExample)
JP (1) JPS62187345A (enExample)
DE (1) DE3687749T2 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63244623A (ja) * 1987-03-30 1988-10-12 Sony Corp ホトレジストの硬化方法
JPH0212811A (ja) * 1988-06-30 1990-01-17 Ushio Inc ウエハ周辺露光方法
JP2003086495A (ja) * 2001-09-13 2003-03-20 Fuji Electric Co Ltd フォトレジストパターンの形成方法
JP2009031587A (ja) * 2007-07-27 2009-02-12 Sumitomo Electric Ind Ltd 光デバイスの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6129124A (ja) * 1984-07-20 1986-02-10 Ushio Inc 半導体ウエハ−の処理方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4548688A (en) * 1983-05-23 1985-10-22 Fusion Semiconductor Systems Hardening of photoresist

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6129124A (ja) * 1984-07-20 1986-02-10 Ushio Inc 半導体ウエハ−の処理方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63244623A (ja) * 1987-03-30 1988-10-12 Sony Corp ホトレジストの硬化方法
JPH0212811A (ja) * 1988-06-30 1990-01-17 Ushio Inc ウエハ周辺露光方法
JP2003086495A (ja) * 2001-09-13 2003-03-20 Fuji Electric Co Ltd フォトレジストパターンの形成方法
JP2009031587A (ja) * 2007-07-27 2009-02-12 Sumitomo Electric Ind Ltd 光デバイスの製造方法

Also Published As

Publication number Publication date
DE3687749T2 (de) 1993-09-09
EP0233333A2 (en) 1987-08-26
DE3687749D1 (de) 1993-03-25
EP0233333A3 (en) 1988-02-24
EP0233333B1 (en) 1993-02-10
JPH0574060B2 (enExample) 1993-10-15

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees