JPS621872A - 堆積膜形成法 - Google Patents

堆積膜形成法

Info

Publication number
JPS621872A
JPS621872A JP60140396A JP14039685A JPS621872A JP S621872 A JPS621872 A JP S621872A JP 60140396 A JP60140396 A JP 60140396A JP 14039685 A JP14039685 A JP 14039685A JP S621872 A JPS621872 A JP S621872A
Authority
JP
Japan
Prior art keywords
deposited film
substrate
forming
gas
reaction tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60140396A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0368948B2 (enrdf_load_stackoverflow
Inventor
Kyosuke Ogawa
小川　恭介
Tomohiro Kimura
知裕 木村
Teruo Misumi
三角　輝男
Atsushi Koike
淳 小池
Shigehira Iida
茂平 飯田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP60140396A priority Critical patent/JPS621872A/ja
Publication of JPS621872A publication Critical patent/JPS621872A/ja
Publication of JPH0368948B2 publication Critical patent/JPH0368948B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
  • Light Receiving Elements (AREA)
JP60140396A 1985-06-28 1985-06-28 堆積膜形成法 Granted JPS621872A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60140396A JPS621872A (ja) 1985-06-28 1985-06-28 堆積膜形成法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60140396A JPS621872A (ja) 1985-06-28 1985-06-28 堆積膜形成法

Publications (2)

Publication Number Publication Date
JPS621872A true JPS621872A (ja) 1987-01-07
JPH0368948B2 JPH0368948B2 (enrdf_load_stackoverflow) 1991-10-30

Family

ID=15267817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60140396A Granted JPS621872A (ja) 1985-06-28 1985-06-28 堆積膜形成法

Country Status (1)

Country Link
JP (1) JPS621872A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101018194B1 (ko) * 2008-03-17 2011-02-28 삼성엘이디 주식회사 화학 기상 증착 장치
CN104674184A (zh) * 2013-12-02 2015-06-03 有研新材料股份有限公司 用于硅基多晶硅膜沉积的气体传输装置及沉积方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188672A (en) * 1981-05-18 1982-11-19 Oki Electric Ind Co Ltd Formation of glow discharge film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188672A (en) * 1981-05-18 1982-11-19 Oki Electric Ind Co Ltd Formation of glow discharge film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101018194B1 (ko) * 2008-03-17 2011-02-28 삼성엘이디 주식회사 화학 기상 증착 장치
CN104674184A (zh) * 2013-12-02 2015-06-03 有研新材料股份有限公司 用于硅基多晶硅膜沉积的气体传输装置及沉积方法

Also Published As

Publication number Publication date
JPH0368948B2 (enrdf_load_stackoverflow) 1991-10-30

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