JPS62186425U - - Google Patents

Info

Publication number
JPS62186425U
JPS62186425U JP1986073881U JP7388186U JPS62186425U JP S62186425 U JPS62186425 U JP S62186425U JP 1986073881 U JP1986073881 U JP 1986073881U JP 7388186 U JP7388186 U JP 7388186U JP S62186425 U JPS62186425 U JP S62186425U
Authority
JP
Japan
Prior art keywords
sample
electron beam
electron
shielding ring
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986073881U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986073881U priority Critical patent/JPS62186425U/ja
Publication of JPS62186425U publication Critical patent/JPS62186425U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Beam Exposure (AREA)
JP1986073881U 1986-05-19 1986-05-19 Pending JPS62186425U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986073881U JPS62186425U (enrdf_load_stackoverflow) 1986-05-19 1986-05-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986073881U JPS62186425U (enrdf_load_stackoverflow) 1986-05-19 1986-05-19

Publications (1)

Publication Number Publication Date
JPS62186425U true JPS62186425U (enrdf_load_stackoverflow) 1987-11-27

Family

ID=30918601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986073881U Pending JPS62186425U (enrdf_load_stackoverflow) 1986-05-19 1986-05-19

Country Status (1)

Country Link
JP (1) JPS62186425U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006019280A (ja) * 2004-07-01 2006-01-19 Fei Co サンプルを真空排気するための装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006019280A (ja) * 2004-07-01 2006-01-19 Fei Co サンプルを真空排気するための装置

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