JPH0165644U - - Google Patents

Info

Publication number
JPH0165644U
JPH0165644U JP1987159356U JP15935687U JPH0165644U JP H0165644 U JPH0165644 U JP H0165644U JP 1987159356 U JP1987159356 U JP 1987159356U JP 15935687 U JP15935687 U JP 15935687U JP H0165644 U JPH0165644 U JP H0165644U
Authority
JP
Japan
Prior art keywords
holder
sample
partition plate
loading mechanism
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987159356U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987159356U priority Critical patent/JPH0165644U/ja
Publication of JPH0165644U publication Critical patent/JPH0165644U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP1987159356U 1987-10-20 1987-10-20 Pending JPH0165644U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987159356U JPH0165644U (enrdf_load_stackoverflow) 1987-10-20 1987-10-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987159356U JPH0165644U (enrdf_load_stackoverflow) 1987-10-20 1987-10-20

Publications (1)

Publication Number Publication Date
JPH0165644U true JPH0165644U (enrdf_load_stackoverflow) 1989-04-26

Family

ID=31440494

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987159356U Pending JPH0165644U (enrdf_load_stackoverflow) 1987-10-20 1987-10-20

Country Status (1)

Country Link
JP (1) JPH0165644U (enrdf_load_stackoverflow)

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