JPH01114666U - - Google Patents

Info

Publication number
JPH01114666U
JPH01114666U JP948788U JP948788U JPH01114666U JP H01114666 U JPH01114666 U JP H01114666U JP 948788 U JP948788 U JP 948788U JP 948788 U JP948788 U JP 948788U JP H01114666 U JPH01114666 U JP H01114666U
Authority
JP
Japan
Prior art keywords
source material
evaporation source
crucible
supply device
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP948788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0538048Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP948788U priority Critical patent/JPH0538048Y2/ja
Publication of JPH01114666U publication Critical patent/JPH01114666U/ja
Application granted granted Critical
Publication of JPH0538048Y2 publication Critical patent/JPH0538048Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP948788U 1988-01-29 1988-01-29 Expired - Lifetime JPH0538048Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP948788U JPH0538048Y2 (enrdf_load_stackoverflow) 1988-01-29 1988-01-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP948788U JPH0538048Y2 (enrdf_load_stackoverflow) 1988-01-29 1988-01-29

Publications (2)

Publication Number Publication Date
JPH01114666U true JPH01114666U (enrdf_load_stackoverflow) 1989-08-02
JPH0538048Y2 JPH0538048Y2 (enrdf_load_stackoverflow) 1993-09-27

Family

ID=31216270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP948788U Expired - Lifetime JPH0538048Y2 (enrdf_load_stackoverflow) 1988-01-29 1988-01-29

Country Status (1)

Country Link
JP (1) JPH0538048Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0538048Y2 (enrdf_load_stackoverflow) 1993-09-27

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