JPH0291277U - - Google Patents

Info

Publication number
JPH0291277U
JPH0291277U JP17157288U JP17157288U JPH0291277U JP H0291277 U JPH0291277 U JP H0291277U JP 17157288 U JP17157288 U JP 17157288U JP 17157288 U JP17157288 U JP 17157288U JP H0291277 U JPH0291277 U JP H0291277U
Authority
JP
Japan
Prior art keywords
processing chamber
valve body
valve
chamber
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17157288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0444948Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988171572U priority Critical patent/JPH0444948Y2/ja
Publication of JPH0291277U publication Critical patent/JPH0291277U/ja
Application granted granted Critical
Publication of JPH0444948Y2 publication Critical patent/JPH0444948Y2/ja
Expired legal-status Critical Current

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  • Details Of Valves (AREA)
JP1988171572U 1988-12-28 1988-12-28 Expired JPH0444948Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988171572U JPH0444948Y2 (enrdf_load_stackoverflow) 1988-12-28 1988-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988171572U JPH0444948Y2 (enrdf_load_stackoverflow) 1988-12-28 1988-12-28

Publications (2)

Publication Number Publication Date
JPH0291277U true JPH0291277U (enrdf_load_stackoverflow) 1990-07-19
JPH0444948Y2 JPH0444948Y2 (enrdf_load_stackoverflow) 1992-10-22

Family

ID=31463522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988171572U Expired JPH0444948Y2 (enrdf_load_stackoverflow) 1988-12-28 1988-12-28

Country Status (1)

Country Link
JP (1) JPH0444948Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3366542B2 (ja) * 1996-12-25 2003-01-14 株式会社キッツエスシーティー ゲートバルブ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57100732A (en) * 1980-12-16 1982-06-23 Nec Corp Dry etching device
JPS6323653A (ja) * 1986-04-30 1988-01-30 エスクラップ―メディテック　ゲーエムベーハー レ−ザ外科手術装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57100732A (en) * 1980-12-16 1982-06-23 Nec Corp Dry etching device
JPS6323653A (ja) * 1986-04-30 1988-01-30 エスクラップ―メディテック　ゲーエムベーハー レ−ザ外科手術装置

Also Published As

Publication number Publication date
JPH0444948Y2 (enrdf_load_stackoverflow) 1992-10-22

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