JPS6418149U - - Google Patents

Info

Publication number
JPS6418149U
JPS6418149U JP10996287U JP10996287U JPS6418149U JP S6418149 U JPS6418149 U JP S6418149U JP 10996287 U JP10996287 U JP 10996287U JP 10996287 U JP10996287 U JP 10996287U JP S6418149 U JPS6418149 U JP S6418149U
Authority
JP
Japan
Prior art keywords
vacuum
strip
devices
sealing device
seals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10996287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10996287U priority Critical patent/JPS6418149U/ja
Publication of JPS6418149U publication Critical patent/JPS6418149U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Heat Treatment Of Strip Materials And Filament Materials (AREA)
JP10996287U 1987-07-20 1987-07-20 Pending JPS6418149U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10996287U JPS6418149U (enrdf_load_stackoverflow) 1987-07-20 1987-07-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10996287U JPS6418149U (enrdf_load_stackoverflow) 1987-07-20 1987-07-20

Publications (1)

Publication Number Publication Date
JPS6418149U true JPS6418149U (enrdf_load_stackoverflow) 1989-01-30

Family

ID=31346685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10996287U Pending JPS6418149U (enrdf_load_stackoverflow) 1987-07-20 1987-07-20

Country Status (1)

Country Link
JP (1) JPS6418149U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011104861A1 (ja) * 2010-02-26 2011-09-01 入江工研株式会社 ゲートバルブのシール構造

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS624866A (ja) * 1985-06-29 1987-01-10 Ishikawajima Harima Heavy Ind Co Ltd 真空処理装置のシ−ル装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS624866A (ja) * 1985-06-29 1987-01-10 Ishikawajima Harima Heavy Ind Co Ltd 真空処理装置のシ−ル装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011104861A1 (ja) * 2010-02-26 2011-09-01 入江工研株式会社 ゲートバルブのシール構造

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