JPS6418150U - - Google Patents

Info

Publication number
JPS6418150U
JPS6418150U JP10996387U JP10996387U JPS6418150U JP S6418150 U JPS6418150 U JP S6418150U JP 10996387 U JP10996387 U JP 10996387U JP 10996387 U JP10996387 U JP 10996387U JP S6418150 U JPS6418150 U JP S6418150U
Authority
JP
Japan
Prior art keywords
vacuum
strip
biting
vacuum seal
closing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10996387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10996387U priority Critical patent/JPS6418150U/ja
Publication of JPS6418150U publication Critical patent/JPS6418150U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Heat Treatment Of Strip Materials And Filament Materials (AREA)
JP10996387U 1987-07-20 1987-07-20 Pending JPS6418150U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10996387U JPS6418150U (enrdf_load_stackoverflow) 1987-07-20 1987-07-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10996387U JPS6418150U (enrdf_load_stackoverflow) 1987-07-20 1987-07-20

Publications (1)

Publication Number Publication Date
JPS6418150U true JPS6418150U (enrdf_load_stackoverflow) 1989-01-30

Family

ID=31346687

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10996387U Pending JPS6418150U (enrdf_load_stackoverflow) 1987-07-20 1987-07-20

Country Status (1)

Country Link
JP (1) JPS6418150U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS624866A (ja) * 1985-06-29 1987-01-10 Ishikawajima Harima Heavy Ind Co Ltd 真空処理装置のシ−ル装置
JPS624865A (ja) * 1985-06-29 1987-01-10 Ishikawajima Harima Heavy Ind Co Ltd 真空処理装置のシ−ル装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS624866A (ja) * 1985-06-29 1987-01-10 Ishikawajima Harima Heavy Ind Co Ltd 真空処理装置のシ−ル装置
JPS624865A (ja) * 1985-06-29 1987-01-10 Ishikawajima Harima Heavy Ind Co Ltd 真空処理装置のシ−ル装置

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