JPS6319567U - - Google Patents

Info

Publication number
JPS6319567U
JPS6319567U JP10985586U JP10985586U JPS6319567U JP S6319567 U JPS6319567 U JP S6319567U JP 10985586 U JP10985586 U JP 10985586U JP 10985586 U JP10985586 U JP 10985586U JP S6319567 U JPS6319567 U JP S6319567U
Authority
JP
Japan
Prior art keywords
vacuum
chamber
strip
shaped body
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10985586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10985586U priority Critical patent/JPS6319567U/ja
Publication of JPS6319567U publication Critical patent/JPS6319567U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Heat Treatment Of Strip Materials And Filament Materials (AREA)
JP10985586U 1986-07-17 1986-07-17 Pending JPS6319567U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10985586U JPS6319567U (enrdf_load_stackoverflow) 1986-07-17 1986-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10985586U JPS6319567U (enrdf_load_stackoverflow) 1986-07-17 1986-07-17

Publications (1)

Publication Number Publication Date
JPS6319567U true JPS6319567U (enrdf_load_stackoverflow) 1988-02-09

Family

ID=30988340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10985586U Pending JPS6319567U (enrdf_load_stackoverflow) 1986-07-17 1986-07-17

Country Status (1)

Country Link
JP (1) JPS6319567U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011072315A1 (de) * 2009-12-14 2011-06-23 Vat Holding Ag Vakuumventil

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011072315A1 (de) * 2009-12-14 2011-06-23 Vat Holding Ag Vakuumventil

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