JPS6218622U - - Google Patents

Info

Publication number
JPS6218622U
JPS6218622U JP11031385U JP11031385U JPS6218622U JP S6218622 U JPS6218622 U JP S6218622U JP 11031385 U JP11031385 U JP 11031385U JP 11031385 U JP11031385 U JP 11031385U JP S6218622 U JPS6218622 U JP S6218622U
Authority
JP
Japan
Prior art keywords
flow path
mass flowmeter
sensor
thermal mass
sensing element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11031385U
Other languages
English (en)
Other versions
JPH0350426Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11031385U priority Critical patent/JPH0350426Y2/ja
Publication of JPS6218622U publication Critical patent/JPS6218622U/ja
Application granted granted Critical
Publication of JPH0350426Y2 publication Critical patent/JPH0350426Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)

Description

【図面の簡単な説明】
第１図は本考案を適用した熱式質量流量計の一
実施例を示す断面図、第２図はその側面図、第３
図はスパン流量を減少させた場合の側面図、第４
図は特殊断面形状のバイパスを使用した場合の実
施例を示す側面図である。 １……ベース、２……センサ流路、３，４，５
……バイパス流路、１０，１１……ねじ、２０…
…センサユニツト、２１……Ｏリング、２２……
センサ、３０……シヤツタ、３１……ねじ、３２
……三日月形バイパス流路。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) センサ流路とバイパス流路とを持つた熱式
    質量流量計に於いて、センサ流路とバイパス流路
    とを並行に一体的に形成し、前記センサ流路内に
    感温素子を挿入し、熱式に質量流量を求めること
    を特徴とする熱式質量流量計。 (2) 前記感温素子をＩＣ製造技術により形成し
    たことを更に特徴とする実用新案登録請求の範囲
    第(1)項に記載の熱式質量流量計。
JP11031385U 1985-07-17 1985-07-17 Expired JPH0350426Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11031385U JPH0350426Y2 (ja) 1985-07-17 1985-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11031385U JPH0350426Y2 (ja) 1985-07-17 1985-07-17

Publications (2)

Publication Number Publication Date
JPS6218622U true JPS6218622U (ja) 1987-02-04
JPH0350426Y2 JPH0350426Y2 (ja) 1991-10-28

Family

ID=30989218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11031385U Expired JPH0350426Y2 (ja) 1985-07-17 1985-07-17

Country Status (1)

Country Link
JP (1) JPH0350426Y2 (ja)

Also Published As

Publication number Publication date
JPH0350426Y2 (ja) 1991-10-28

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