JPS6218621U - - Google Patents

Info

Publication number
JPS6218621U
JPS6218621U JP11027585U JP11027585U JPS6218621U JP S6218621 U JPS6218621 U JP S6218621U JP 11027585 U JP11027585 U JP 11027585U JP 11027585 U JP11027585 U JP 11027585U JP S6218621 U JPS6218621 U JP S6218621U
Authority
JP
Japan
Prior art keywords
flow path
sensor
thermal mass
mass flowmeter
sensor flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11027585U
Other languages
English (en)
Other versions
JPH0350425Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11027585U priority Critical patent/JPH0350425Y2/ja
Publication of JPS6218621U publication Critical patent/JPS6218621U/ja
Application granted granted Critical
Publication of JPH0350425Y2 publication Critical patent/JPH0350425Y2/ja
Expired legal-status Critical Current

Links

Description

【図面の簡単な説明】
第1図a,bは本考案を用いた熱式質量流量計
の一実施例を示す断面図、側面図、第2図はプラ
グ4を抜き出した場合のプラグ4の斜視図、第3
図は本考案による熱式質量流量計の流量対出力電
圧の特性図、第4図はその非直線誤差を示す図で
ある。 1……ベース、2,3……ねじ、4……プラグ
、5……バイパス流路、6……センサ流路、7,
7′,8,8′……絞り板、20……センサユニ
ツト、21……Oリング、22……センサ。

Claims (1)

    【実用新案登録請求の範囲】
  1. センサ流路とバイパス流路を持ち、前記センサ
    流路内に感温素子を挿入して質量流量を求める熱
    式質量流量計に於いて、前記センサ流路の一部を
    センサ挿入部よりもせばめたことを特徴とする熱
    式質量流量計。
JP11027585U 1985-07-18 1985-07-18 Expired JPH0350425Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11027585U JPH0350425Y2 (ja) 1985-07-18 1985-07-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11027585U JPH0350425Y2 (ja) 1985-07-18 1985-07-18

Publications (2)

Publication Number Publication Date
JPS6218621U true JPS6218621U (ja) 1987-02-04
JPH0350425Y2 JPH0350425Y2 (ja) 1991-10-28

Family

ID=30989145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11027585U Expired JPH0350425Y2 (ja) 1985-07-18 1985-07-18

Country Status (1)

Country Link
JP (1) JPH0350425Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11118568A (ja) * 1997-10-20 1999-04-30 Aichi Tokei Denki Co Ltd 流量計
JP2006118927A (ja) * 2004-10-20 2006-05-11 Yamatake Corp 流量計

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11118568A (ja) * 1997-10-20 1999-04-30 Aichi Tokei Denki Co Ltd 流量計
JP2006118927A (ja) * 2004-10-20 2006-05-11 Yamatake Corp 流量計

Also Published As

Publication number Publication date
JPH0350425Y2 (ja) 1991-10-28

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