JPS6218371Y2 - - Google Patents

Info

Publication number
JPS6218371Y2
JPS6218371Y2 JP1982140453U JP14045382U JPS6218371Y2 JP S6218371 Y2 JPS6218371 Y2 JP S6218371Y2 JP 1982140453 U JP1982140453 U JP 1982140453U JP 14045382 U JP14045382 U JP 14045382U JP S6218371 Y2 JPS6218371 Y2 JP S6218371Y2
Authority
JP
Japan
Prior art keywords
shaft
surface plate
brush
polishing
polishing cloth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982140453U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5946667U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1982140453U priority Critical patent/JPS5946667U/ja
Publication of JPS5946667U publication Critical patent/JPS5946667U/ja
Application granted granted Critical
Publication of JPS6218371Y2 publication Critical patent/JPS6218371Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP1982140453U 1982-09-16 1982-09-16 ポリシヤの研磨布ブラツシング装置 Granted JPS5946667U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982140453U JPS5946667U (ja) 1982-09-16 1982-09-16 ポリシヤの研磨布ブラツシング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982140453U JPS5946667U (ja) 1982-09-16 1982-09-16 ポリシヤの研磨布ブラツシング装置

Publications (2)

Publication Number Publication Date
JPS5946667U JPS5946667U (ja) 1984-03-28
JPS6218371Y2 true JPS6218371Y2 (enrdf_load_stackoverflow) 1987-05-12

Family

ID=30314464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982140453U Granted JPS5946667U (ja) 1982-09-16 1982-09-16 ポリシヤの研磨布ブラツシング装置

Country Status (1)

Country Link
JP (1) JPS5946667U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6304132B2 (ja) * 2015-06-12 2018-04-04 信越半導体株式会社 ワークの加工装置

Also Published As

Publication number Publication date
JPS5946667U (ja) 1984-03-28

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