JPS6218371Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to an apparatus for brushing a polishing cloth of a polisher.

[Technical background of the invention and its problems]

Polisher is a process in which an abrasive cloth is attached to one or both of the opposing surfaces of an upper surface plate and a lower surface plate that rotate in opposite directions, a workpiece such as a wafer is placed between these plates, and the abrasive cloth is attached. The fixed surface plate and the workpiece are rotated or moved relative to each other, and the surface of the workpiece is ground or polished using the polishing cloth, but the polishing cloth becomes clogged as the polishing progresses. This clogging not only reduces machining capacity but also increases machining heat and reduces machining accuracy. For this reason, the polishing cloth was manually brushed for each polishing to prevent clogging, but conventionally this brushing took about 1/4 of the polishing time.

[Purpose of invention]

An object of the present invention is to provide an apparatus for brushing a polisher with a polishing cloth, which allows the aforementioned polishing cloth to be brushed by a machine without manual labor, in a short time, more completely, and more safely.

[Summary of the idea]

In order to achieve this object, the present invention provides a shaft rotated by a drive source between the upper surface plate and the lower surface plate that rotate in opposite directions, and a cylindrical brush on this shaft. The brush is mounted so that it is clamped between upper and lower surface plates, and the brush is rotated between the two surface plates that rotate in opposite directions to stick it to one or both of the opposing surfaces of the surface plate. It is designed to brush the abrasive cloth that is worn.

[Example of idea]

Figures 1 to 4 below show an embodiment of the present invention.
The diagram will be explained. 1 is an upper surface plate, 2 is a lower surface plate, and polishing cloths 3 and 4 are adhered to their mutually opposing surfaces, respectively. The lower surface plate 2 is rotatably supported by a base 9 via a bearing holder 5, a hollow shaft 6, bearings 7, 7, and a bearing metal 8.
Rotation is applied from a drive source (not shown) through a gear 10 attached to the rotor.

The upper surface plate 1 is connected to a piston rod 13 of a sub-cylinder 12 via a coupling 11. The sub cylinder 12 is a piston rod 16 of the main cylinder 15 fixed to the frame 14.
is connected to.

A shaft 18 is rotatably mounted within the hollow shaft 6 via bearings 17, 17. This shaft 18 is configured to be rotated in the opposite direction to the hollow shaft 6 from a drive source (not shown) via a gear 19 attached to its lower end. A spline shaft 20 is attached to the upper end of the shaft 18, and the spline shaft 20 is adapted to be removably engaged with the spline hole 11a of the coupling ring 11.

A driving source 21 is disposed outside between the upper surface plate 1 and the lower surface plate 2. This drive source 21 is attached to a frame 22. This frame 22
As shown in FIG. 2, there is a two-part structure which can be opened and closed by a hinge 24 and can be closed by a screw 26 and a hinge nut 27, which are swingably provided by a pin 25. A bearing 23 is attached to which a shaft 29 of a brush 28 is removably engaged. This axis 2
9 is adapted to be detachably connected to a drive shaft 31 extending from the drive source 21 via a sleeve 30, as shown in FIG. In addition, in FIG. 3, 32 is a key, and 33 is a set screw.

The brush 28 has a cylindrical shape, and has a first
As shown in the figure, the piston rod 16 of the main cylinder 15 is at its lower limit, the piston rod 13 of the sub-cylinder 12 is at its upper limit, and the upper surface plate 1 and lower surface plate 2 face each other at a predetermined interval. The bristles of the brush 28 are positioned between these two surface plates and have a diameter such that they are deflected by a predetermined amount, and the length thereof is such that it reaches from the outer diameter end to the inner diameter end of the polishing cloths 3 and 4. ing.

Next, the operation of this device will be explained. During polishing, the set screw 33 of the sleeve 30,
33, and remove the sleeve 3 as shown in FIG.
0 from the shaft 29 of the brush 28, and then
Loosen the post nut 27 of the bearing 23 of No. 9, and remove the screw 2.
6 from the upper side 23a of the bearing 23, and
The upper side 23a is opened with a chisel 24, and the brush 28, together with its shaft 29, is removed from between the upper surface plate 1 and the lower surface plate 2 and placed.

Then, a workpiece (not shown) is inserted between the upper surface plate 1 and the lower surface plate 2, and the piston 16 of the main cylinder 15 is placed at the lower limit position as shown in FIG. The clamping pressure of the workpiece by the surface plate 1 and the lower surface plate 2, that is, the pressure for setting the machining pressure to a predetermined value, is applied to the lower chamber or the upper chamber, and the workpiece is moved through the upper and lower polishing cloths 3, 4. and press them with upper and lower surface plates 1 and 2.
2 are rotated in opposite directions by gears 19 and 10 from a drive source (not shown) to perform polishing. In reality, the position of the workpiece inserted between the upper and lower surface plates 1 and 2 is regulated by a carrier (not shown), and the carrier is further rotated and revolved by a sun gear and an internal gear (not shown). However, since these are not directly related to the present invention, illustration thereof is omitted.

When the polishing process is performed for a predetermined time in this way,
The polishing cloths 3 and 4 become clogged with fine particles generated during processing. Therefore, when a predetermined number of machining operations are completed, the polishing cloth 3,
Remove the carrier and other items that are present between the 4 parts and brush them.

When brushing, first the brush 28 is attached to the drive shaft 31. At this time, the piston rods 16 of the main cylinder 15 and the sub cylinder 12,
13 have already been placed at the upper limit position in order to take out the workpiece, and the gap between the upper surface plate 1 and the lower surface plate 2 is sufficiently wide. Therefore, the brush 28 is placed on the polishing cloth 4 on the lower surface plate 2, its shaft 29 is fitted into the open bearing 23, and the sleeve 30 is placed on the shaft 29.
and tighten the setscrew 33 to tighten the drive shaft 31.
and the shaft 29 are connected. Next, the upper side 2 of the bearing 23
3a, and tighten the bearing 23 with the screw 26 and nut 27. In this way, when the brush 28 is installed in the predetermined position, the main cylinder 1
Only the piston rod 16 of No. 5 is lowered to the lowering limit position as shown in FIG. 1, and the upper surface plate 1 is lowered. In this way, when the piston rod 16 is at the lower limit position and the other piston rod 13 is at the upper limit position, the upper and lower polishing cloths 3,
Since the brushes 4 are sized to hold the brushes 28 in a slightly bent manner, the brushes 28 reliably come into contact with the polishing cloths 3 and 4 as the upper surface plate 1 is lowered.

Next, the upper and lower surface plates 1 and 2 are rotated in opposite directions by the gears 19 and 10, and the brush 28 is rotated by the drive source 21 to perform brushing. At this time, it is preferable that the direction of rotation of the brush 28 is determined such that the contact portions are oriented in opposite directions with respect to the direction of rotation of the polishing cloths 3 and 4.

When brushing is completed, the brush 28 is removed from the drive shaft 31 and bearing 23 and taken out from between the upper and lower surface plates 1 and 2, as described above, and the next polishing process is performed.

5 and 6 show another embodiment of the present invention, in which the shaft 29 of the brush 28 is connected to the drive shaft 31 by means of a pin 34 within a plane parallel to the facing surfaces of the surface plates 1 and 2. When brushing, a sleeve 36 is engaged by a spring 35 between the drive shaft 31 and the shaft 29, and the shaft 29 is connected to the drive shaft 3.
1 and when brushing is not performed, as shown in Figure 6,
The sleeve 36 is removed from the shaft 29 against the spring 35, the shaft 29 is bent outward of the lower surface plate 2, and the brush 28 is moved by the stopper 37 to the surface plates 1, 2.
This was done so that it would not get in between.

According to this device, the brush 28 between the surface plates
can be easily accessed and installed.

In addition, in the above-mentioned embodiment, the present invention was applied to a so-called double-sided polishing device in which polishing cloths 3 and 4 were attached to upper and lower surface plates 1 and 2, respectively.
The present invention can also be applied to a so-called single-sided polishing device that performs polishing by attaching a polishing cloth to only one of the upper and lower surface plates 1 and 2 and attaching the workpiece to the other surface plate. Needless to say.

[Effect of idea]

As described above, according to the present invention, it is possible to perform brushing with the polishing cloth reliably in a short period of time.

[Brief explanation of the drawing]

FIG. 1 is a schematic sectional view showing an embodiment of the present invention;
Figure 2 is a partially enlarged sectional view taken along the - line in Figure 1, Figure 3 is a partially broken enlarged view showing how the brush shaft is attached, and Figure 4 is when the brush shaft shown in Figure 3 is removed. FIG. 5 is a partially cutaway enlarged front view showing another embodiment of the present invention, and FIG. 6 is a plan view showing the device shown in FIG. 5 in a non-brushing state. It is a diagram. 1... Upper surface plate, 2... Lower surface plate, 3, 4... Polishing cloth, 10, 19... Gear, 12... Sub cylinder, 15... Main cylinder, 21... Drive source,
23... Bearing, 28... Brush, 29... Brush shaft, 30, 36... Sleeve, 31... Drive shaft, 34... Pin, 35... Spring, 37...
...Stotsupa.

Claims (1)

[Claims for Utility Model Registration] (1) A shaft rotated by a drive source is provided outwardly between an upper surface plate and a lower surface plate that rotate in opposite directions, and a cylindrical brush is mounted on this shaft. A polishing cloth brushing device for a polisher, which is attached and the brushes are clamped between upper and lower surface plates. (2) The polisher polishing cloth brushing device according to claim 1, wherein the brush is bendably connected to the shaft.