JPS5946667U - Polisher polishing cloth brushing device - Google Patents
Polisher polishing cloth brushing deviceInfo
- Publication number
- JPS5946667U JPS5946667U JP1982140453U JP14045382U JPS5946667U JP S5946667 U JPS5946667 U JP S5946667U JP 1982140453 U JP1982140453 U JP 1982140453U JP 14045382 U JP14045382 U JP 14045382U JP S5946667 U JPS5946667 U JP S5946667U
- Authority
- JP
- Japan
- Prior art keywords
- polishing cloth
- brushing device
- cloth brushing
- polisher
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は本考案の一実施例を示す概要断面図、第2図は
第1図の■−■線による部分拡大断面図、第3図はブラ
シの軸の取付状態を示す一部破断拡大図、第4図は第3
図に示したブラシの軸を外す場合の状態を示す一部破断
拡大図、第5図は本考案の他の実施例を示す一部破断要
部拡大正面図、第6図は第5図に示した装置の非ブラッ
シング状態を示す平面図である。
1・・・上噺盤、2・・・下定盤、3.4・・・研磨布
、10.19・・・ギヤ、12・・・サブシリンダ、1
5・・・メインシリンダ、21・・・駆動源、23・・
・軸受、28・・・ブラシ、29・・・ブラシの軸、3
0.36・・・スリーブ、31・・・駆動軸、34・・
・ピン、35・・・スフリング、37・・・ストッパ。Fig. 1 is a schematic sectional view showing an embodiment of the present invention, Fig. 2 is a partially enlarged sectional view taken along the line ■-■ in Fig. 1, and Fig. 3 is a partially broken enlarged view showing how the brush shaft is installed. Figure 4 is the third
FIG. 5 is a partially cutaway enlarged front view showing another embodiment of the present invention, and FIG. FIG. 3 is a plan view of the illustrated device in a non-brushing state; 1... Upper surface plate, 2... Lower surface plate, 3.4... Polishing cloth, 10.19... Gear, 12... Sub cylinder, 1
5... Main cylinder, 21... Drive source, 23...
・Bearing, 28...Brush, 29...Brush shaft, 3
0.36...Sleeve, 31...Drive shaft, 34...
・Pin, 35... Suffling, 37... Stopper.
Claims (2)
の外方に駆動源によって回転される軸を設け、この軸に
円筒形状のブラシを取付け、該ブラシを上下の定盤で挟
圧するようにしたポリシャの研磨布ブラッシング装置。(1) A shaft rotated by a drive source is provided outwardly between the upper surface plate and the lower surface plate that rotate in opposite directions, a cylindrical brush is attached to this shaft, and the brush is rotated between the upper and lower surface plates. Polisher's polishing cloth brushing device that applies pressure.
る実用新案登録請求の範囲第1項記載のポリシャの研磨
布ブラッシング装置。(2) The polisher polishing cloth brushing device according to claim 1, wherein the brush is bendably connected to the shaft.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1982140453U JPS5946667U (en) | 1982-09-16 | 1982-09-16 | Polisher polishing cloth brushing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1982140453U JPS5946667U (en) | 1982-09-16 | 1982-09-16 | Polisher polishing cloth brushing device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5946667U true JPS5946667U (en) | 1984-03-28 |
JPS6218371Y2 JPS6218371Y2 (en) | 1987-05-12 |
Family
ID=30314464
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1982140453U Granted JPS5946667U (en) | 1982-09-16 | 1982-09-16 | Polisher polishing cloth brushing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5946667U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016199333A1 (en) * | 2015-06-12 | 2016-12-15 | 信越半導体株式会社 | Workpiece machining device |
-
1982
- 1982-09-16 JP JP1982140453U patent/JPS5946667U/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016199333A1 (en) * | 2015-06-12 | 2016-12-15 | 信越半導体株式会社 | Workpiece machining device |
JP2017001151A (en) * | 2015-06-12 | 2017-01-05 | 信越半導体株式会社 | Processing device of workpiece |
KR20180017004A (en) * | 2015-06-12 | 2018-02-20 | 신에쯔 한도타이 가부시키가이샤 | Workpiece machining device |
US10335918B2 (en) | 2015-06-12 | 2019-07-02 | Shin-Etsu Handotai Co., Ltd. | Workpiece processing apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS6218371Y2 (en) | 1987-05-12 |
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