JPS5946667U - Polisher polishing cloth brushing device - Google Patents

Polisher polishing cloth brushing device

Info

Publication number
JPS5946667U
JPS5946667U JP1982140453U JP14045382U JPS5946667U JP S5946667 U JPS5946667 U JP S5946667U JP 1982140453 U JP1982140453 U JP 1982140453U JP 14045382 U JP14045382 U JP 14045382U JP S5946667 U JPS5946667 U JP S5946667U
Authority
JP
Japan
Prior art keywords
polishing cloth
brushing device
cloth brushing
polisher
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1982140453U
Other languages
Japanese (ja)
Other versions
JPS6218371Y2 (en
Inventor
正治 木下
正美 遠藤
優 池辺
Original Assignee
株式会社東芝
東芝機械株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社東芝, 東芝機械株式会社 filed Critical 株式会社東芝
Priority to JP1982140453U priority Critical patent/JPS5946667U/en
Publication of JPS5946667U publication Critical patent/JPS5946667U/en
Application granted granted Critical
Publication of JPS6218371Y2 publication Critical patent/JPS6218371Y2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例を示す概要断面図、第２図は
第１図の■−■線による部分拡大断面図、第３図はブラ
シの軸の取付状態を示す一部破断拡大図、第４図は第３
図に示したブラシの軸を外す場合の状態を示す一部破断
拡大図、第５図は本考案の他の実施例を示す一部破断要
部拡大正面図、第６図は第５図に示した装置の非ブラッ
シング状態を示す平面図である。 １・・・上噺盤、２・・・下定盤、３．４・・・研磨布
、１０．１９・・・ギヤ、１２・・・サブシリンダ、１
５・・・メインシリンダ、２１・・・駆動源、２３・・
・軸受、２８・・・ブラシ、２９・・・ブラシの軸、３
０．３６・・・スリーブ、３１・・・駆動軸、３４・・
・ピン、３５・・・スフリング、３７・・・ストッパ。Fig. 1 is a schematic sectional view showing an embodiment of the present invention, Fig. 2 is a partially enlarged sectional view taken along the line ■-■ in Fig. 1, and Fig. 3 is a partially broken enlarged view showing how the brush shaft is installed. Figure 4 is the third
FIG. 5 is a partially cutaway enlarged front view showing another embodiment of the present invention, and FIG. FIG. 3 is a plan view of the illustrated device in a non-brushing state; 1... Upper surface plate, 2... Lower surface plate, 3.4... Polishing cloth, 10.19... Gear, 12... Sub cylinder, 1
5... Main cylinder, 21... Drive source, 23...
・Bearing, 28...Brush, 29...Brush shaft, 3
0.36...Sleeve, 31...Drive shaft, 34...
・Pin, 35... Suffling, 37... Stopper.

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）互いに反対方向へ回転する上定盤と下定盤との間
の外方に駆動源によって回転される軸を設け、この軸に
円筒形状のブラシを取付け、該ブラシを上下の定盤で挟
圧するようにしたポリシャの研磨布ブラッシング装置。(1) A shaft rotated by a drive source is provided outwardly between the upper surface plate and the lower surface plate that rotate in opposite directions, a cylindrical brush is attached to this shaft, and the brush is rotated between the upper and lower surface plates. Polisher's polishing cloth brushing device that applies pressure. （２）ブラシが軸に対して折り曲げ可能に連結されてい
る実用新案登録請求の範囲第１項記載のポリシャの研磨
布ブラッシング装置。(2) The polisher polishing cloth brushing device according to claim 1, wherein the brush is bendably connected to the shaft.
JP1982140453U 1982-09-16 1982-09-16 Polisher polishing cloth brushing device Granted JPS5946667U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982140453U JPS5946667U (en) 1982-09-16 1982-09-16 Polisher polishing cloth brushing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982140453U JPS5946667U (en) 1982-09-16 1982-09-16 Polisher polishing cloth brushing device

Publications (2)

Publication Number Publication Date
JPS5946667U true JPS5946667U (en) 1984-03-28
JPS6218371Y2 JPS6218371Y2 (en) 1987-05-12

Family

ID=30314464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982140453U Granted JPS5946667U (en) 1982-09-16 1982-09-16 Polisher polishing cloth brushing device

Country Status (1)

Country Link
JP (1) JPS5946667U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016199333A1 (en) * 2015-06-12 2016-12-15 信越半導体株式会社 Workpiece machining device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016199333A1 (en) * 2015-06-12 2016-12-15 信越半導体株式会社 Workpiece machining device
JP2017001151A (en) * 2015-06-12 2017-01-05 信越半導体株式会社 Processing device of workpiece
KR20180017004A (en) * 2015-06-12 2018-02-20 신에쯔 한도타이 가부시키가이샤 Workpiece machining device
US10335918B2 (en) 2015-06-12 2019-07-02 Shin-Etsu Handotai Co., Ltd. Workpiece processing apparatus

Also Published As

Publication number Publication date
JPS6218371Y2 (en) 1987-05-12

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