JPS62182970U - - Google Patents
Info
- Publication number
- JPS62182970U JPS62182970U JP7117586U JP7117586U JPS62182970U JP S62182970 U JPS62182970 U JP S62182970U JP 7117586 U JP7117586 U JP 7117586U JP 7117586 U JP7117586 U JP 7117586U JP S62182970 U JPS62182970 U JP S62182970U
- Authority
- JP
- Japan
- Prior art keywords
- power source
- heating
- potential distribution
- improving electrode
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7117586U JPS62182970U (es) | 1986-05-14 | 1986-05-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7117586U JPS62182970U (es) | 1986-05-14 | 1986-05-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62182970U true JPS62182970U (es) | 1987-11-20 |
Family
ID=30913491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7117586U Pending JPS62182970U (es) | 1986-05-14 | 1986-05-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62182970U (es) |
-
1986
- 1986-05-14 JP JP7117586U patent/JPS62182970U/ja active Pending
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