JPS62182970U - - Google Patents
Info
- Publication number
- JPS62182970U JPS62182970U JP7117586U JP7117586U JPS62182970U JP S62182970 U JPS62182970 U JP S62182970U JP 7117586 U JP7117586 U JP 7117586U JP 7117586 U JP7117586 U JP 7117586U JP S62182970 U JPS62182970 U JP S62182970U
- Authority
- JP
- Japan
- Prior art keywords
- power source
- heating
- potential distribution
- improving electrode
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 description 1
Description
第１図はこの考案の一実施例を示す断面図、第
２図は従来の薄膜形成装置を示す断面図である。
図において、１はるつぼ、２は蒸着物質、３は
蒸気噴出ノズル、４は蒸気、５は加熱用フイラメ
ント、８はイオン化フイラメント、９はグリツド
、２１は電位分布改善用電極、２２は直流電源、
２３は加熱電源である。なお、図中同一符号は同
一または相当部分を示す。
FIG. 1 is a sectional view showing an embodiment of this invention, and FIG. 2 is a sectional view showing a conventional thin film forming apparatus. In the figure, 1 is a crucible, 2 is a vapor deposition material, 3 is a steam jet nozzle, 4 is steam, 5 is a heating filament, 8 is an ionization filament, 9 is a grid, 21 is an electrode for improving potential distribution, 22 is a DC power source,
23 is a heating power source. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
ら放出された熱電子を加速してるつぼから噴出さ
れた蒸着物質の蒸気に衝突させてこれをイオン化
するグリツドと、上記るつぼとの間に、上記熱電
子の軌道を変える電位分布改善用電極を配設した
ものにおいて、この電位分布改善用電極に、これ
を高温に加熱する加熱電源を接続したことを特徴
とする薄膜形成装置。 (2) 加熱電源は、独立した交流電源、またはイ
オン化フイラメント等を加熱する交流電源を使用
するようにしたことを特徴とする実用新案登録請
求の範囲第１項記載の薄膜形成装置。[Claims for Utility Model Registration] (1) A grid that accelerates thermionic electrons emitted from an ionizing filament in a vacuum chamber and ionizes the vapor of a vapor-deposited material ejected from a crucible, and the crucible; A thin film forming apparatus characterized in that a potential distribution improving electrode for changing the trajectory of the thermoelectrons is disposed between the electrodes, and a heating power source for heating the potential distribution improving electrode to a high temperature is connected to the potential distribution improving electrode. . (2) The thin film forming apparatus according to claim 1, wherein the heating power source is an independent AC power source or an AC power source for heating an ionizing filament or the like.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7117586U JPS62182970U (en) | 1986-05-14 | 1986-05-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7117586U JPS62182970U (en) | 1986-05-14 | 1986-05-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62182970U true JPS62182970U (en) | 1987-11-20 |
Family
ID=30913491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7117586U Pending JPS62182970U (en) | 1986-05-14 | 1986-05-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62182970U (en) |
-
1986
- 1986-05-14 JP JP7117586U patent/JPS62182970U/ja active Pending
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