JPS62193656U - - Google Patents
Info
- Publication number
- JPS62193656U JPS62193656U JP8097086U JP8097086U JPS62193656U JP S62193656 U JPS62193656 U JP S62193656U JP 8097086 U JP8097086 U JP 8097086U JP 8097086 U JP8097086 U JP 8097086U JP S62193656 U JPS62193656 U JP S62193656U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- ion source
- cathode
- vacuum container
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010891 electric arc Methods 0.000 claims description 2
- 230000001629 suppression Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
Description
第１図ａは本考案の一実施例のイオン源の構成
を示す断面図、同図ｂはａ図のＡ―Ａ′断面図、
第２図はアーク放電の電圧，電流特性図である。
１……プラズマ生成室、２……フイラメント、
３……熱陰極、４……加速電極、５……電子抑制
電極、６……フイラメント電源、７……アーク電
源、８……加速電源、９……電子抑制電源、１０
……ガス導入口。
FIG. 1a is a cross-sectional view showing the configuration of an ion source according to an embodiment of the present invention, and FIG. 1b is a cross-sectional view taken along line A-A' in FIG.
Figure 2 shows the voltage and current characteristics of arc discharge. 1... Plasma generation chamber, 2... Filament,
3... Hot cathode, 4... Accelerating electrode, 5... Electron suppression electrode, 6... Filament power supply, 7... Arc power supply, 8... Acceleration power supply, 9... Electron suppression power supply, 10
...Gas inlet.
Claims (1)
もしくは更に別に陰極を備え、真空容器を陽極と
するか、もしくは別に陽極を挿入し、両者間のア
ーク放電によつてプラズマを生成するイオン源に
おいて、アーク電流をフイラメントの動作温度に
よつて決まる飽和電流で動作させることを特徴と
するイオン源。 The filament placed inside the vacuum container is used as a cathode,
Alternatively, in an ion source that is further equipped with a cathode and uses a vacuum container as an anode, or inserts a separate anode and generates plasma by arc discharge between the two, the arc current is set to saturation determined by the operating temperature of the filament. An ion source characterized by being operated by electric current.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8097086U JPS62193656U (en) | 1986-05-30 | 1986-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8097086U JPS62193656U (en) | 1986-05-30 | 1986-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62193656U true JPS62193656U (en) | 1987-12-09 |
Family
ID=30932271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8097086U Pending JPS62193656U (en) | 1986-05-30 | 1986-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62193656U (en) |
-
1986
- 1986-05-30 JP JP8097086U patent/JPS62193656U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS62193656U (en) | ||
| JP2569913Y2 (en) | Ion implanter | |
| JPH0472548U (en) | ||
| JPH0298451U (en) | ||
| JPH0229149U (en) | ||
| JPH02110166U (en) | ||
| JPS5719941A (en) | Negative ion source | |
| JPS6370651U (en) | ||
| JPH02123051U (en) | ||
| JPH0394753U (en) | ||
| JPS594428Y2 (en) | Vacuum sealing mechanism of the ion generating section at the tip of the ion source device | |
| JPS62182970U (en) | ||
| JPS6251648U (en) | ||
| JPH0295148U (en) | ||
| JPS63112745U (en) | ||
| JPH0332348U (en) | ||
| JPS62191100U (en) | ||
| JPS62170729U (en) | ||
| JPH0333946U (en) | ||
| JPS6346465U (en) | ||
| JPS6370650U (en) | ||
| JPS62160454U (en) | ||
| JPH03109258U (en) | ||
| JPS62203265U (en) | ||
| JPH034456U (en) |