JPH0472548U - - Google Patents
Info
- Publication number
- JPH0472548U JPH0472548U JP11555890U JP11555890U JPH0472548U JP H0472548 U JPH0472548 U JP H0472548U JP 11555890 U JP11555890 U JP 11555890U JP 11555890 U JP11555890 U JP 11555890U JP H0472548 U JPH0472548 U JP H0472548U
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- electron beam
- anode
- hole
- aligned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 230000001133 acceleration Effects 0.000 claims description 3
- 229910052746 lanthanum Inorganic materials 0.000 claims description 3
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11555890U JPH0472548U (es) | 1990-11-02 | 1990-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11555890U JPH0472548U (es) | 1990-11-02 | 1990-11-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0472548U true JPH0472548U (es) | 1992-06-25 |
Family
ID=31863334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11555890U Pending JPH0472548U (es) | 1990-11-02 | 1990-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0472548U (es) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6315548B2 (es) * | 1978-11-29 | 1988-04-05 | Tokyo Shibaura Electric Co | |
| JPS6453422A (en) * | 1987-08-24 | 1989-03-01 | Tokyo Electron Ltd | Dry etching device |
-
1990
- 1990-11-02 JP JP11555890U patent/JPH0472548U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6315548B2 (es) * | 1978-11-29 | 1988-04-05 | Tokyo Shibaura Electric Co | |
| JPS6453422A (en) * | 1987-08-24 | 1989-03-01 | Tokyo Electron Ltd | Dry etching device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GB684710A (en) | Improvements relating to high vacuum pumps | |
| JPH0472548U (es) | ||
| US3775630A (en) | Electron gun device of field emission type | |
| JPH0692638B2 (ja) | 薄膜装置 | |
| JP3127636B2 (ja) | イオン源 | |
| JP2569913Y2 (ja) | イオン注入装置 | |
| ATE140560T1 (de) | Ionenpumpe und vakuumpumpanlage dafür | |
| JPS62193656U (es) | ||
| JPS6127053A (ja) | 電子ビ−ム源 | |
| JPS6251648U (es) | ||
| JPH0766760B2 (ja) | 収束性高速原子線源 | |
| JPS62182970U (es) | ||
| JP2637947B2 (ja) | ビームプラズマ型イオン銃 | |
| JP2989989B2 (ja) | イオン発生装置 | |
| JPS594428Y2 (ja) | イオン源装置先端イオン発生部の真空封止機構 | |
| JPS62203265U (es) | ||
| JPS63134659A (ja) | ホロ−カソ−ド型イオン源装置 | |
| JPS5719941A (en) | Negative ion source | |
| JPH02110166U (es) | ||
| JPH01158641U (es) | ||
| JPS6360300U (es) | ||
| JPS58174849U (ja) | プラズマｘ線発生装置 | |
| JPS6215758U (es) | ||
| JPS6251735U (es) | ||
| JPS62157968U (es) |