JPS6218281Y2 - - Google Patents
Info
- Publication number
- JPS6218281Y2 JPS6218281Y2 JP14066182U JP14066182U JPS6218281Y2 JP S6218281 Y2 JPS6218281 Y2 JP S6218281Y2 JP 14066182 U JP14066182 U JP 14066182U JP 14066182 U JP14066182 U JP 14066182U JP S6218281 Y2 JPS6218281 Y2 JP S6218281Y2
- Authority
- JP
- Japan
- Prior art keywords
- coating liquid
- coating
- exhaust path
- exhaust
- pedestal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000576 coating method Methods 0.000 claims description 81
- 239000011248 coating agent Substances 0.000 claims description 75
- 239000007788 liquid Substances 0.000 claims description 53
- 230000006837 decompression Effects 0.000 claims description 17
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 15
- 238000007789 sealing Methods 0.000 description 7
- 230000008901 benefit Effects 0.000 description 4
- 230000009467 reduction Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14066182U JPS5944572U (ja) | 1982-09-16 | 1982-09-16 | 塗布装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14066182U JPS5944572U (ja) | 1982-09-16 | 1982-09-16 | 塗布装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5944572U JPS5944572U (ja) | 1984-03-24 |
| JPS6218281Y2 true JPS6218281Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-05-11 |
Family
ID=30314853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14066182U Granted JPS5944572U (ja) | 1982-09-16 | 1982-09-16 | 塗布装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5944572U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1982
- 1982-09-16 JP JP14066182U patent/JPS5944572U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5944572U (ja) | 1984-03-24 |