JPS62180738U - - Google Patents
Info
- Publication number
- JPS62180738U JPS62180738U JP6784286U JP6784286U JPS62180738U JP S62180738 U JPS62180738 U JP S62180738U JP 6784286 U JP6784286 U JP 6784286U JP 6784286 U JP6784286 U JP 6784286U JP S62180738 U JPS62180738 U JP S62180738U
- Authority
- JP
- Japan
- Prior art keywords
- silicon diaphragm
- sensor
- pedestal
- integrated
- semiconductor pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000012790 adhesive layer Substances 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6784286U JPS62180738U (de) | 1986-05-06 | 1986-05-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6784286U JPS62180738U (de) | 1986-05-06 | 1986-05-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62180738U true JPS62180738U (de) | 1987-11-17 |
Family
ID=30907112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6784286U Pending JPS62180738U (de) | 1986-05-06 | 1986-05-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62180738U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015068800A (ja) * | 2013-09-30 | 2015-04-13 | セイコーエプソン株式会社 | 圧力センサー、電子機器および移動体 |
| JP2015513090A (ja) * | 2012-03-09 | 2015-04-30 | エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ | 微小機械測定素子および微小機械測定素子の製造方法 |
-
1986
- 1986-05-06 JP JP6784286U patent/JPS62180738U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015513090A (ja) * | 2012-03-09 | 2015-04-30 | エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ | 微小機械測定素子および微小機械測定素子の製造方法 |
| US9506831B2 (en) | 2012-03-09 | 2016-11-29 | Epcos Ag | Micromechanical measuring element and method for producing a micromechanical measuring element |
| JP2015068800A (ja) * | 2013-09-30 | 2015-04-13 | セイコーエプソン株式会社 | 圧力センサー、電子機器および移動体 |
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