JPS6218033Y2 - - Google Patents

Info

Publication number
JPS6218033Y2
JPS6218033Y2 JP1980087793U JP8779380U JPS6218033Y2 JP S6218033 Y2 JPS6218033 Y2 JP S6218033Y2 JP 1980087793 U JP1980087793 U JP 1980087793U JP 8779380 U JP8779380 U JP 8779380U JP S6218033 Y2 JPS6218033 Y2 JP S6218033Y2
Authority
JP
Japan
Prior art keywords
housing
piston body
nozzle
document table
hydrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980087793U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5712743U (it
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980087793U priority Critical patent/JPS6218033Y2/ja
Publication of JPS5712743U publication Critical patent/JPS5712743U/ja
Application granted granted Critical
Publication of JPS6218033Y2 publication Critical patent/JPS6218033Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Load-Bearing And Curtain Walls (AREA)
JP1980087793U 1980-06-23 1980-06-23 Expired JPS6218033Y2 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980087793U JPS6218033Y2 (it) 1980-06-23 1980-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980087793U JPS6218033Y2 (it) 1980-06-23 1980-06-23

Publications (2)

Publication Number Publication Date
JPS5712743U JPS5712743U (it) 1982-01-22
JPS6218033Y2 true JPS6218033Y2 (it) 1987-05-09

Family

ID=29449893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980087793U Expired JPS6218033Y2 (it) 1980-06-23 1980-06-23

Country Status (1)

Country Link
JP (1) JPS6218033Y2 (it)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5237966U (it) * 1975-09-10 1977-03-17
JPS5252579A (en) * 1975-10-27 1977-04-27 Canon Inc Clearance adjusng method
JPS5443480A (en) * 1977-09-12 1979-04-06 Hitachi Ltd Mask aligner
JPS5485678A (en) * 1977-12-20 1979-07-07 Canon Inc High accuracy alignment method for air bearing guide system xy stage
JPS5530823A (en) * 1978-08-25 1980-03-04 Nippon Telegr & Teleph Corp <Ntt> Mask-wafer gap setting device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52156452U (it) * 1976-05-22 1977-11-28
JPS5647947Y2 (it) * 1976-12-09 1981-11-10

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5237966U (it) * 1975-09-10 1977-03-17
JPS5252579A (en) * 1975-10-27 1977-04-27 Canon Inc Clearance adjusng method
JPS5443480A (en) * 1977-09-12 1979-04-06 Hitachi Ltd Mask aligner
JPS5485678A (en) * 1977-12-20 1979-07-07 Canon Inc High accuracy alignment method for air bearing guide system xy stage
JPS5530823A (en) * 1978-08-25 1980-03-04 Nippon Telegr & Teleph Corp <Ntt> Mask-wafer gap setting device

Also Published As

Publication number Publication date
JPS5712743U (it) 1982-01-22

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