JPS6218033Y2 - - Google Patents
Info
- Publication number
- JPS6218033Y2 JPS6218033Y2 JP1980087793U JP8779380U JPS6218033Y2 JP S6218033 Y2 JPS6218033 Y2 JP S6218033Y2 JP 1980087793 U JP1980087793 U JP 1980087793U JP 8779380 U JP8779380 U JP 8779380U JP S6218033 Y2 JPS6218033 Y2 JP S6218033Y2
- Authority
- JP
- Japan
- Prior art keywords
- housing
- piston body
- nozzle
- document table
- hydrostatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 16
- 230000002706 hydrostatic effect Effects 0.000 claims description 9
- 230000003247 decreasing effect Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Load-Bearing And Curtain Walls (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980087793U JPS6218033Y2 (de) | 1980-06-23 | 1980-06-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980087793U JPS6218033Y2 (de) | 1980-06-23 | 1980-06-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5712743U JPS5712743U (de) | 1982-01-22 |
JPS6218033Y2 true JPS6218033Y2 (de) | 1987-05-09 |
Family
ID=29449893
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1980087793U Expired JPS6218033Y2 (de) | 1980-06-23 | 1980-06-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6218033Y2 (de) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5237966U (de) * | 1975-09-10 | 1977-03-17 | ||
JPS5252579A (en) * | 1975-10-27 | 1977-04-27 | Canon Inc | Clearance adjusng method |
JPS5443480A (en) * | 1977-09-12 | 1979-04-06 | Hitachi Ltd | Mask aligner |
JPS5485678A (en) * | 1977-12-20 | 1979-07-07 | Canon Inc | High accuracy alignment method for air bearing guide system xy stage |
JPS5530823A (en) * | 1978-08-25 | 1980-03-04 | Nippon Telegr & Teleph Corp <Ntt> | Mask-wafer gap setting device |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52156452U (de) * | 1976-05-22 | 1977-11-28 | ||
JPS5647947Y2 (de) * | 1976-12-09 | 1981-11-10 |
-
1980
- 1980-06-23 JP JP1980087793U patent/JPS6218033Y2/ja not_active Expired
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5237966U (de) * | 1975-09-10 | 1977-03-17 | ||
JPS5252579A (en) * | 1975-10-27 | 1977-04-27 | Canon Inc | Clearance adjusng method |
JPS5443480A (en) * | 1977-09-12 | 1979-04-06 | Hitachi Ltd | Mask aligner |
JPS5485678A (en) * | 1977-12-20 | 1979-07-07 | Canon Inc | High accuracy alignment method for air bearing guide system xy stage |
JPS5530823A (en) * | 1978-08-25 | 1980-03-04 | Nippon Telegr & Teleph Corp <Ntt> | Mask-wafer gap setting device |
Also Published As
Publication number | Publication date |
---|---|
JPS5712743U (de) | 1982-01-22 |
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