JPS62177176A - 薄膜形成装置 - Google Patents

薄膜形成装置

Info

Publication number
JPS62177176A
JPS62177176A JP1688986A JP1688986A JPS62177176A JP S62177176 A JPS62177176 A JP S62177176A JP 1688986 A JP1688986 A JP 1688986A JP 1688986 A JP1688986 A JP 1688986A JP S62177176 A JPS62177176 A JP S62177176A
Authority
JP
Japan
Prior art keywords
ions
thin film
deposition
film forming
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1688986A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0121226B2 (enrdf_load_stackoverflow
Inventor
Katsuhiko Yui
湯井　勝彦
Kazuhiko Fukutani
和彦 福谷
Kenji Sugiyama
賢司 杉山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP1688986A priority Critical patent/JPS62177176A/ja
Publication of JPS62177176A publication Critical patent/JPS62177176A/ja
Publication of JPH0121226B2 publication Critical patent/JPH0121226B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1688986A 1986-01-30 1986-01-30 薄膜形成装置 Granted JPS62177176A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1688986A JPS62177176A (ja) 1986-01-30 1986-01-30 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1688986A JPS62177176A (ja) 1986-01-30 1986-01-30 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPS62177176A true JPS62177176A (ja) 1987-08-04
JPH0121226B2 JPH0121226B2 (enrdf_load_stackoverflow) 1989-04-20

Family

ID=11928730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1688986A Granted JPS62177176A (ja) 1986-01-30 1986-01-30 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPS62177176A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH024967A (ja) * 1988-02-08 1990-01-09 Optical Coating Lab Inc 薄膜形成装置及び方法
JPH02175867A (ja) * 1988-12-27 1990-07-09 Japan Steel Works Ltd:The 複合イオンビーム照射方法及び照射装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6176665A (ja) * 1984-09-21 1986-04-19 Nippon Telegr & Teleph Corp <Ntt> 蒸着膜形成装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6176665A (ja) * 1984-09-21 1986-04-19 Nippon Telegr & Teleph Corp <Ntt> 蒸着膜形成装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH024967A (ja) * 1988-02-08 1990-01-09 Optical Coating Lab Inc 薄膜形成装置及び方法
JPH02175867A (ja) * 1988-12-27 1990-07-09 Japan Steel Works Ltd:The 複合イオンビーム照射方法及び照射装置

Also Published As

Publication number Publication date
JPH0121226B2 (enrdf_load_stackoverflow) 1989-04-20

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