JPH032947B2 - - Google Patents

Info

Publication number
JPH032947B2
JPH032947B2 JP62123400A JP12340087A JPH032947B2 JP H032947 B2 JPH032947 B2 JP H032947B2 JP 62123400 A JP62123400 A JP 62123400A JP 12340087 A JP12340087 A JP 12340087A JP H032947 B2 JPH032947 B2 JP H032947B2
Authority
JP
Japan
Prior art keywords
ion implantation
ion
mass
substrate
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62123400A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63290262A (ja
Inventor
Tokiaki Hayashi
Takayuki Shingyochi
Jun Yoshitoshi
Kazunari Nakamoto
Naomi Matsumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SURFACE HIGH PERFORMANCE RES
Original Assignee
SURFACE HIGH PERFORMANCE RES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SURFACE HIGH PERFORMANCE RES filed Critical SURFACE HIGH PERFORMANCE RES
Priority to JP12340087A priority Critical patent/JPS63290262A/ja
Publication of JPS63290262A publication Critical patent/JPS63290262A/ja
Publication of JPH032947B2 publication Critical patent/JPH032947B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12340087A 1987-05-20 1987-05-20 薄膜の形成方法 Granted JPS63290262A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12340087A JPS63290262A (ja) 1987-05-20 1987-05-20 薄膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12340087A JPS63290262A (ja) 1987-05-20 1987-05-20 薄膜の形成方法

Publications (2)

Publication Number Publication Date
JPS63290262A JPS63290262A (ja) 1988-11-28
JPH032947B2 true JPH032947B2 (enrdf_load_stackoverflow) 1991-01-17

Family

ID=14859617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12340087A Granted JPS63290262A (ja) 1987-05-20 1987-05-20 薄膜の形成方法

Country Status (1)

Country Link
JP (1) JPS63290262A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100537014B1 (ko) * 2002-10-04 2006-01-20 권영욱 이온 플래이팅 방식에 의한 유해전자파 방지용 및 투명아크릴 폴리 카보네이트의 금속 칼라 박막 형성 시스템

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57174459A (en) * 1981-04-21 1982-10-27 Namiki Precision Jewel Co Ltd Formation of thin film
JPS6056066A (ja) * 1983-09-05 1985-04-01 Nissin Electric Co Ltd 薄膜形成装置

Also Published As

Publication number Publication date
JPS63290262A (ja) 1988-11-28

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